Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
An ultra-high speed vacuum pump evacuation system includes a first stage ultra-high speed turbofan and a second stage conventional turbomolecular pump. The turbofan is either connected in series to a chamber to be evacuated, or is optionally disposed entirely within the chamber. The turbofan employs large diameter rotor blades operating at high linear blade velocity to impart an ultra-high pumping speed to a fluid. The second stage turbomolecular pump is fluidly connected downstream from the first stage turbofan. In operation, the first stage turbofan operates in a pre-existing vacuum, with the fluid asserting only small axial forces upon the rotor blades. The turbofan imparts a velocity to fluid particles towards an outlet at a high volume rate, but moderate compression ratio. The second stage conventional turbomolecular pump then compresses the fluid to pressures for evacuation by a roughing pump.
- Research Organization:
- Universities Research Association, Inc., Washington, DC (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC02-76CH03000
- Assignee:
- Universities Research Association, Inc. (Washington, DC)
- Patent Number(s):
- 7,021,888
- Application Number:
- 10/737,570
- OSTI ID:
- 1175684
- Country of Publication:
- United States
- Language:
- English
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