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Title: Three-dimensional microelectromechanical tilting platform operated by gear-driven racks

Abstract

A microelectromechanical (MEM) tiltable-platform apparatus is disclosed which utilizes a light-reflective platform (i.e. a micromirror) which is supported above a substrate by flexures which can be bent upwards to tilt the platform in any direction over an angle of generally .+-.10 degrees using a gear-driven rack attached to each flexure. Each rack is driven by a rotary microengine (i.e. a micromotor); and an optional thermal actuator can be used in combination with each microengine for initially an initial uplifting of the platform away from the substrate. The MEM apparatus has applications for optical switching (e.g. between a pair of optical fibers) or for optical beam scanning.

Inventors:
;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175540
Patent Number(s):
6,960,849
Application Number:
10/404,780
Assignee:
Sandia Corporation SNL-L
DOE Contract Number:
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Klody, Kelly A., and Habbit, Jr., Robert D. Three-dimensional microelectromechanical tilting platform operated by gear-driven racks. United States: N. p., 2005. Web.
Klody, Kelly A., & Habbit, Jr., Robert D. Three-dimensional microelectromechanical tilting platform operated by gear-driven racks. United States.
Klody, Kelly A., and Habbit, Jr., Robert D. Tue . "Three-dimensional microelectromechanical tilting platform operated by gear-driven racks". United States. doi:. https://www.osti.gov/servlets/purl/1175540.
@article{osti_1175540,
title = {Three-dimensional microelectromechanical tilting platform operated by gear-driven racks},
author = {Klody, Kelly A. and Habbit, Jr., Robert D.},
abstractNote = {A microelectromechanical (MEM) tiltable-platform apparatus is disclosed which utilizes a light-reflective platform (i.e. a micromirror) which is supported above a substrate by flexures which can be bent upwards to tilt the platform in any direction over an angle of generally .+-.10 degrees using a gear-driven rack attached to each flexure. Each rack is driven by a rotary microengine (i.e. a micromotor); and an optional thermal actuator can be used in combination with each microengine for initially an initial uplifting of the platform away from the substrate. The MEM apparatus has applications for optical switching (e.g. between a pair of optical fibers) or for optical beam scanning.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 01 00:00:00 EST 2005},
month = {Tue Nov 01 00:00:00 EST 2005}
}

Patent:

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  • A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display.more » The MEM apparatus with the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.« less
  • A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display.more » The MEM apparatus with-the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.« less
  • A power transmission having three simple planetary assemblies, each having its own carrier and its own planet, sun, and ring gears. A speed-varying module is connected in driving relation to the input shaft and in driving relationship to the sun gears of the first two planetary assemblies, these two sun gears being connected together on a common shaft. The speed-varying means may comprise a pair of hydraulic units hydraulically interconnected so that one serves as a pump while the other serves as a motor and vice versa, one of the units having a variable stroke and being connected in drivingmore » relation to the input shaft, the other unit, which may have a fixed stroke, being connected in driving relation to the sun gears. The input shaft is also connected to drive the second ring gear and, furthermore is clutchable to the carrier of the third planetary assembly. A brake grounds the first carrier in the first range and in reverse and causes drive to be delivered to the output through the first ring gear in a hydrostatic mode. The carrier of the second planetary assembly drives the ring gear of the third planetary assembly, which is clutchable to the output shaft, and the sun gear of the third planetary assembly is mounted rigidly to the output shaft.« less
  • The present invention comprises a microelectromechanical positioner to achieve substantially translational positioning of a platform without rotational motion, thereby maintaining a constant angular orientation of the platform during movement. A linkage mechanism of the positioner can comprise parallelogram linkages to constrain the rotational motion of the platform. Such linkages further can comprise flexural hinges or other turning joints at the linkage pivots to eliminate the need for rubbing surfaces. A plurality of the linkage mechanisms can be used to enable translational motion of the platform with two degrees of freedom. A variety of means can be used to actuate themore » positioner. Independent actuation of the anchor links of the linkage mechanisms with rotary electrostatic actuators can be used to provide controlled translational movement of the platform.« less
  • A polymer material useful as the porous dielectric medium for microfluidic devices generally and electrokinetic pumps in particular. The polymer material is produced from an inverse (water-in-oil) emulsion that creates a 3-dimensional network characterized by small pores and high internal volume, characteristics that are particularly desirable for the dielectric medium for electrokinetic pumps. Further, the material can be cast-to-shape inside a microchannel. The use of bifunctional monomers provides for charge density within the polymer structure sufficient to support electroosmotic flow. The 3-dimensional polymeric material can also be covalently bound to the channel walls thereby making it suitable for high-pressure applications.