skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Three-dimensional microelectromechanical tilting platform operated by gear-driven racks

Abstract

A microelectromechanical (MEM) tiltable-platform apparatus is disclosed which utilizes a light-reflective platform (i.e. a micromirror) which is supported above a substrate by flexures which can be bent upwards to tilt the platform in any direction over an angle of generally .+-.10 degrees using a gear-driven rack attached to each flexure. Each rack is driven by a rotary microengine (i.e. a micromotor); and an optional thermal actuator can be used in combination with each microengine for initially an initial uplifting of the platform away from the substrate. The MEM apparatus has applications for optical switching (e.g. between a pair of optical fibers) or for optical beam scanning.

Inventors:
;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175540
Patent Number(s):
6,960,849
Application Number:
10/404,780
Assignee:
Sandia Corporation SNL-L
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Klody, Kelly A., and Habbit, Jr., Robert D. Three-dimensional microelectromechanical tilting platform operated by gear-driven racks. United States: N. p., 2005. Web.
Klody, Kelly A., & Habbit, Jr., Robert D. Three-dimensional microelectromechanical tilting platform operated by gear-driven racks. United States.
Klody, Kelly A., and Habbit, Jr., Robert D. Tue . "Three-dimensional microelectromechanical tilting platform operated by gear-driven racks". United States. doi:. https://www.osti.gov/servlets/purl/1175540.
@article{osti_1175540,
title = {Three-dimensional microelectromechanical tilting platform operated by gear-driven racks},
author = {Klody, Kelly A. and Habbit, Jr., Robert D.},
abstractNote = {A microelectromechanical (MEM) tiltable-platform apparatus is disclosed which utilizes a light-reflective platform (i.e. a micromirror) which is supported above a substrate by flexures which can be bent upwards to tilt the platform in any direction over an angle of generally .+-.10 degrees using a gear-driven rack attached to each flexure. Each rack is driven by a rotary microengine (i.e. a micromotor); and an optional thermal actuator can be used in combination with each microengine for initially an initial uplifting of the platform away from the substrate. The MEM apparatus has applications for optical switching (e.g. between a pair of optical fibers) or for optical beam scanning.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 01 00:00:00 EST 2005},
month = {Tue Nov 01 00:00:00 EST 2005}
}

Patent:

Save / Share: