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Title: Non- contacting capacitive diagnostic device

Abstract

A non-contacting capacitive diagnostic device includes a pulsed light source for producing an electric field in a semiconductor or photovoltaic device or material to be evaluated and a circuit responsive to the electric field. The circuit is not in physical contact with the device or material being evaluated and produces an electrical signal characteristic of the electric field produced in the device or material. The diagnostic device permits quality control and evaluation of semiconductor or photovoltaic device properties in continuous manufacturing processes.

Inventors:
Publication Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175424
Patent Number(s):
6,917,209
Application Number:
09/953,477
Assignee:
Energy Conversion Devices, Inc. (Rochester Hills, MI)
DOE Contract Number:  
AC36-99GO10337
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Ellison, Timothy. Non- contacting capacitive diagnostic device. United States: N. p., 2005. Web.
Ellison, Timothy. Non- contacting capacitive diagnostic device. United States.
Ellison, Timothy. 2005. "Non- contacting capacitive diagnostic device". United States. https://www.osti.gov/servlets/purl/1175424.
@article{osti_1175424,
title = {Non- contacting capacitive diagnostic device},
author = {Ellison, Timothy},
abstractNote = {A non-contacting capacitive diagnostic device includes a pulsed light source for producing an electric field in a semiconductor or photovoltaic device or material to be evaluated and a circuit responsive to the electric field. The circuit is not in physical contact with the device or material being evaluated and produces an electrical signal characteristic of the electric field produced in the device or material. The diagnostic device permits quality control and evaluation of semiconductor or photovoltaic device properties in continuous manufacturing processes.},
doi = {},
url = {https://www.osti.gov/biblio/1175424}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2005},
month = {7}
}