skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Ring laser scatterometer

Abstract

A scatterometer utilizes the dead zone resulting from lockup caused by scatter from a sample located in the optical path of a ring laser at a location where counter-rotating pulses cross. The frequency of one pulse relative to the other is varied across the lockup dead zone.

Inventors:
;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175414
Patent Number(s):
6,912,053
Application Number:
10/390,508
Assignee:
Sandia Corporation SNL-L
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Ackermann, Mark, and Diels, Jean-Claude. Ring laser scatterometer. United States: N. p., 2005. Web.
Ackermann, Mark, & Diels, Jean-Claude. Ring laser scatterometer. United States.
Ackermann, Mark, and Diels, Jean-Claude. Tue . "Ring laser scatterometer". United States. https://www.osti.gov/servlets/purl/1175414.
@article{osti_1175414,
title = {Ring laser scatterometer},
author = {Ackermann, Mark and Diels, Jean-Claude},
abstractNote = {A scatterometer utilizes the dead zone resulting from lockup caused by scatter from a sample located in the optical path of a ring laser at a location where counter-rotating pulses cross. The frequency of one pulse relative to the other is varied across the lockup dead zone.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 28 00:00:00 EDT 2005},
month = {Tue Jun 28 00:00:00 EDT 2005}
}

Patent:

Save / Share: