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Title: Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale

Abstract

The chemical composition of thin films is modulated during their growth. A computer code has been developed to design specific processes for producing a desired chemical composition for various deposition geometries. Good agreement between theoretical and experimental results was achieved.

Inventors:
;
Publication Date:
Research Org.:
EUV Limited Liability Corporation, Santa Clara, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175275
Patent Number(s):
6,867,149
Application Number:
10/256,324
Assignee:
EUV Limited Liability Corporation (Santa Clara, CA)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Bajt, Sasa, and Vernon, Stephen P. Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale. United States: N. p., 2005. Web.
Bajt, Sasa, & Vernon, Stephen P. Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale. United States.
Bajt, Sasa, and Vernon, Stephen P. Tue . "Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale". United States. https://www.osti.gov/servlets/purl/1175275.
@article{osti_1175275,
title = {Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale},
author = {Bajt, Sasa and Vernon, Stephen P.},
abstractNote = {The chemical composition of thin films is modulated during their growth. A computer code has been developed to design specific processes for producing a desired chemical composition for various deposition geometries. Good agreement between theoretical and experimental results was achieved.},
doi = {},
url = {https://www.osti.gov/biblio/1175275}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2005},
month = {3}
}

Patent:

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