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Title: Differentially-driven MEMS spatial light modulator

Abstract

A MEMS SLM and an electrostatic actuator associated with a pixel in an SLM. The actuator has three electrodes: a lower electrode; an upper electrode fixed with respect to the lower electrode; and a center electrode suspended and actuable between the upper and lower electrodes. The center electrode is capable of resiliently-biasing to restore the center electrode to a non-actuated first equilibrium position, and a mirror is operably connected to the center electrode. A first voltage source provides a first bias voltage across the lower and center electrodes and a second voltage source provides a second bias voltage across the upper and center electrodes, with the first and second bias voltages determining the non-actuated first equilibrium position of the center electrode. A third voltage source provides a variable driver voltage across one of the lower/center and upper/center electrode pairs in series with the corresponding first or second bias voltage, to actuate the center electrode to a dynamic second equilibrium position.

Inventors:
Publication Date:
Research Org.:
The Regents of the University of California, Oakland, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175039
Patent Number(s):
6,791,735
Application Number:
10/340,317
Assignee:
University Of California, The Regents Of
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Stappaerts, Eddy A. Differentially-driven MEMS spatial light modulator. United States: N. p., 2004. Web.
Stappaerts, Eddy A. Differentially-driven MEMS spatial light modulator. United States.
Stappaerts, Eddy A. Tue . "Differentially-driven MEMS spatial light modulator". United States. https://www.osti.gov/servlets/purl/1175039.
@article{osti_1175039,
title = {Differentially-driven MEMS spatial light modulator},
author = {Stappaerts, Eddy A.},
abstractNote = {A MEMS SLM and an electrostatic actuator associated with a pixel in an SLM. The actuator has three electrodes: a lower electrode; an upper electrode fixed with respect to the lower electrode; and a center electrode suspended and actuable between the upper and lower electrodes. The center electrode is capable of resiliently-biasing to restore the center electrode to a non-actuated first equilibrium position, and a mirror is operably connected to the center electrode. A first voltage source provides a first bias voltage across the lower and center electrodes and a second voltage source provides a second bias voltage across the upper and center electrodes, with the first and second bias voltages determining the non-actuated first equilibrium position of the center electrode. A third voltage source provides a variable driver voltage across one of the lower/center and upper/center electrode pairs in series with the corresponding first or second bias voltage, to actuate the center electrode to a dynamic second equilibrium position.},
doi = {},
url = {https://www.osti.gov/biblio/1175039}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {9}
}

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