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Title: Universal EUV in-band intensity detector

Abstract

Extreme ultraviolet light is detected using a universal in-band detector for detecting extreme ultraviolet radiation that includes: (a) an EUV sensitive photodiode having a diode active area that generates a current responsive to EUV radiation; (b) one or more mirrors that reflects EUV radiation having a defined wavelength(s) to the diode active area; and (c) a mask defining a pinhole that is positioned above the diode active area, wherein EUV radiation passing through the pinhole is restricted substantially to illuminating the diode active area.

Inventors:
Publication Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1174995
Patent Number(s):
6,781,135
Application Number:
10/301,080
Assignee:
EUV, LLC (Santa Clara, CA) OSTI
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY

Citation Formats

Berger, Kurt W. Universal EUV in-band intensity detector. United States: N. p., 2004. Web.
Berger, Kurt W. Universal EUV in-band intensity detector. United States.
Berger, Kurt W. Tue . "Universal EUV in-band intensity detector". United States. https://www.osti.gov/servlets/purl/1174995.
@article{osti_1174995,
title = {Universal EUV in-band intensity detector},
author = {Berger, Kurt W.},
abstractNote = {Extreme ultraviolet light is detected using a universal in-band detector for detecting extreme ultraviolet radiation that includes: (a) an EUV sensitive photodiode having a diode active area that generates a current responsive to EUV radiation; (b) one or more mirrors that reflects EUV radiation having a defined wavelength(s) to the diode active area; and (c) a mask defining a pinhole that is positioned above the diode active area, wherein EUV radiation passing through the pinhole is restricted substantially to illuminating the diode active area.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 24 00:00:00 EDT 2004},
month = {Tue Aug 24 00:00:00 EDT 2004}
}

Patent:

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