Universal EUV in-band intensity detector
Patent
·
OSTI ID:1174995
Extreme ultraviolet light is detected using a universal in-band detector for detecting extreme ultraviolet radiation that includes: (a) an EUV sensitive photodiode having a diode active area that generates a current responsive to EUV radiation; (b) one or more mirrors that reflects EUV radiation having a defined wavelength(s) to the diode active area; and (c) a mask defining a pinhole that is positioned above the diode active area, wherein EUV radiation passing through the pinhole is restricted substantially to illuminating the diode active area.
- Research Organization:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- EUV, LLC (Santa Clara, CA)
- Patent Number(s):
- 6,781,135
- Application Number:
- 10/301,080
- OSTI ID:
- 1174995
- Country of Publication:
- United States
- Language:
- English
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