skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Discharge source with gas curtain for protecting optics from particles

Abstract

A gas curtain device is employed to deflect debris that is generated by an extreme ultraviolet and soft x-ray radiation discharge source such as an electric discharge plasma source. The gas curtain device projects a stream of gas over the path of the radiation to deflect debris particles into a direction that is different from that of the path of the radiation. The gas curtain can be employed to prevent debris accumulation on the optics used in photolithography.

Inventors:
;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1174795
Patent Number(s):
6,714,624
Application Number:
09/956,275
Assignee:
EUV LLC (Santa Clara, CA) OSTI
DOE Contract Number:
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS

Citation Formats

Fornaciari, Neal R., and Kanouff, Michael P. Discharge source with gas curtain for protecting optics from particles. United States: N. p., 2004. Web.
Fornaciari, Neal R., & Kanouff, Michael P. Discharge source with gas curtain for protecting optics from particles. United States.
Fornaciari, Neal R., and Kanouff, Michael P. 2004. "Discharge source with gas curtain for protecting optics from particles". United States. doi:. https://www.osti.gov/servlets/purl/1174795.
@article{osti_1174795,
title = {Discharge source with gas curtain for protecting optics from particles},
author = {Fornaciari, Neal R. and Kanouff, Michael P.},
abstractNote = {A gas curtain device is employed to deflect debris that is generated by an extreme ultraviolet and soft x-ray radiation discharge source such as an electric discharge plasma source. The gas curtain device projects a stream of gas over the path of the radiation to deflect debris particles into a direction that is different from that of the path of the radiation. The gas curtain can be employed to prevent debris accumulation on the optics used in photolithography.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = 2004,
month = 3
}

Patent:

Save / Share:
  • A process for upgrading a petroleum charge of crude oil or residual fractions thereof, in which the charge is dispersed into a descending curtain of heated, substantially inert contact material. This contact material preferably has a conversion rate not substantially greater than 10% in the CAT D test. The vapors generated on contact of the charge with the curtain are collected on the side of the curtain opposite from where the charge is dispersed. The recovered product has a substantially reduced metals content and Conradson Carbon number and is suitable for catalytic cracking or use as heavy fuel or amore » heavy fuel precursor.« less
  • An apparatus for condensing steam emissions from industrial process sites such as pretreatment plants for painting of car bodies. This includes the formation of water spray curtains extending across the entrance and exit sections of a pretreatment plant to absorb and condense the steam emissions. The collected spray water is circulated through a heat recovery system such that the heat energy of the absorbed steam is transferred out of the water and into heat utilizing processes such as in the heating of the solutions utilized in the spray treatment plant itself.
  • A method is described of making an electric arc furnace graphite electrode comprising: (a) calcining a carbonaceous material selected form the group consisting of anthracite coal, bituminous coal, lignites, and nos. 2 and 3 cokes; (b) mixing the calcined carbonaceous material with pitch, a lubricant, and a boron source selected from the group consisting of elemental boron, boron carbide, silicon tetraboride, and iron boride, in an amount such that the boron content is from about 0.1 to about 5.0 percent by weight of the graphite electrode to form a mixture; (c) extruding the mixture into an electrode form; (d) andmore » graphitizing the electrode form to provide a graphite electrode.« less
  • Single source precursors are subjected to carbon dioxide to form particles of material. The carbon dioxide may be in a supercritical state. Single source precursors also may be subjected to supercritical fluids other than supercritical carbon dioxide to form particles of material. The methods may be used to form nanoparticles. In some embodiments, the methods are used to form chalcopyrite materials. Devices such as, for example, semiconductor devices may be fabricated that include such particles. Methods of forming semiconductor devices include subjecting single source precursors to carbon dioxide to form particles of semiconductor material, and establishing electrical contact between themore » particles and an electrode.« less
  • An electrochemical source for the rapid generation of heat and hydrogen gas upon activation by electrolyte, comprises: (a) an intimate mixture of powdered magnesium and iron metal particles in contact with each other such that the normal electrical contact resistance between said magnesium and iron powdered metal particles is substantially reduced; (b) said iron metal particles being embedded in the surface of at least a substantial portion of said magnesium metal particles to form ironized magnesium particles; (c) each ironized magnesium metal particle forming a shorted micro electrochemical cell; (d) said intimate powdered metal mixture which includes micro electrochemical cellsmore » being sandwiched between sheets of plastic material; (e) moisture retaining absorbent means being included with said intimate powdered metal mixture between said sheets of plastic; (f) said intimate mixture of powdered metal particles operable to produce heat and hydrogen by exothermic reaction upon addition of suitable electrolyte; and (g) the variation of powder sizes and of the ratio of magnesium to iron metal surface area exposed, operating to control the amount of heat and hydrogen produced and the operational life of said source in the electrolyte.« less