Method to fabricate silicon chromatographic column comprising fluid ports
Patent
·
OSTI ID:1174746
A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns.
- Research Organization:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- 6,699,392
- Application Number:
- 10/167,238
- OSTI ID:
- 1174746
- Country of Publication:
- United States
- Language:
- English
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