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Title: Method to fabricate silicon chromatographic column comprising fluid ports

Abstract

A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns.

Inventors:
; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1174746
Patent Number(s):
6,699,392
Application Number:
10/167,238
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-L
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Citation Formats

Manginell, Ronald P., Frye-Mason, Gregory C., Heller, Edwin J., and Adkins, Douglas R. Method to fabricate silicon chromatographic column comprising fluid ports. United States: N. p., 2004. Web.
Manginell, Ronald P., Frye-Mason, Gregory C., Heller, Edwin J., & Adkins, Douglas R. Method to fabricate silicon chromatographic column comprising fluid ports. United States.
Manginell, Ronald P., Frye-Mason, Gregory C., Heller, Edwin J., and Adkins, Douglas R. Tue . "Method to fabricate silicon chromatographic column comprising fluid ports". United States. https://www.osti.gov/servlets/purl/1174746.
@article{osti_1174746,
title = {Method to fabricate silicon chromatographic column comprising fluid ports},
author = {Manginell, Ronald P. and Frye-Mason, Gregory C. and Heller, Edwin J. and Adkins, Douglas R.},
abstractNote = {A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 02 00:00:00 EST 2004},
month = {Tue Mar 02 00:00:00 EST 2004}
}

Patent:

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