Technology for fabrication of a micromagnet on a tip of a MFM/MRFM probe

Patent · 13 January 2004

OSTI ID:1174678

Pelekhov, Denis V.; Hammel, P. Chris; Nunes, Jr., Geoffrey; Midzor, Melissa M.; Roukes, Michael

A method for coating the tip of a mechanical resonator for use in magnetic force microscopy and magnetic resonance force microscopy in which the tip is coated with a ferromagnetic material and the cantilever is not, and the product resulting from the method. A cantilever and incorporated tip are coated with a photoresist, except that surface tension keeps photoresist off the tip. The cantilever and tip are then coated with a magnetic material. Next, acetone is used to lift off the magnetic material from the cantilever but not from the tip.

• Research Organization: The Regents Of University Of California, Los Alamos, NM (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: W-7405-ENG-36
• Assignee: The Regents of the University of California (Los Alamos, NM)
• Patent Number(s): 6,676,813
• Application Number: 10/097,893
• OSTI ID: 1174678
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE