Planar-constructed spatial micro-stage

Patent · 12 January 2004

OSTI ID:1174673

Jokiel, Jr., Bernhard; Benavides, Gilbert L.; Bieg, Lothar F.; Allen, James J.

A multiple degree of freedom platform assembly formed from a plurality of thin films on a substrate can, when activated, move out of the plane of the substrate without additional manufacturing steps. The platform is connected to the substrate by at least three linkages, each linkage being pivotally connected to the platform and the base. At least two of the base connections are to powered traveling devices that are manufactured at one end of a path and which may be moved to locations along the path to cause the platform to move to predetermined positions. The entire assembly, including hinges, is manufactured as planar structures; preferably by a thin film technology such as MEMS.

• Research Organization: Sandia National Laboratories (SNL-CA), Livermore, CA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): 6,675,671
• Application Number: 10/153,109
• OSTI ID: 1174673
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE