Line sensing device for ultrafast laser acoustic inspection using adaptive optics

Patent · 03 November 2003

OSTI ID:1174565

Hale, Thomas C.; Moore, David S.

Apparatus and method for inspecting thin film specimens along a line. A laser emits pulses of light that are split into first, second, third and fourth portions. A delay is introduced into the first portion of pulses and the first portion of pulses is directed onto a thin film specimen along a line. The third portion of pulses is directed onto the thin film specimen along the line. A delay is introduced into the fourth portion of pulses and the delayed fourth portion of pulses are directed to a photorefractive crystal. Pulses of light reflected from the thin film specimen are directed to the photorefractive crystal. Light from the photorefractive crystal is collected and transmitted to a linear photodiode array allowing inspection of the thin film specimens along a line.

• Research Organization: The Regents of the University of California, Los Alamos, NM (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: W-7405-ENG-36
• Assignee: The Regents of the University of California (Los Alamos, NM)
• Patent Number(s): 6,643,005
• Application Number: 10/096,166
• OSTI ID: 1174565
• Country of Publication: United States
• Language: English

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