Compound semiconductor optical waveguide switch

Spahn, Olga B.; Sullivan, Charles T.; Garcia, Ernest J.

Compound semiconductor optical waveguide switch

Patent · 10 June 2003

OSTI ID:1174372

Spahn, Olga B.; Sullivan, Charles T.; Garcia, Ernest J.

An optical waveguide switch is disclosed which is formed from III-V compound semiconductors and which has a moveable optical waveguide with a cantilevered portion that can be bent laterally by an integral electrostatic actuator to route an optical signal (i.e. light) between the moveable optical waveguide and one of a plurality of fixed optical waveguides. A plurality of optical waveguide switches can be formed on a common substrate and interconnected to form an optical switching network.

Research Organization:: Sandia National Laboratories (SNL-CA), Livermore, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Number(s):: 6,577,785

Application Number:: 09/928,199

OSTI ID:: 1174372

Country of Publication:: United States

Language:: English

References (12)

GaAs-based microelectromechanical waveguide switch Spahn, O. B.; Sullivan, C.; Burkhart, J. 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) https://doi.org/10.1109/OMEMS.2000.879617	conference	January 2000
An SOI optical microswitch integrated with silicon waveguides and touch-down micromirror actuators Jin, Young-Hyun; Seo, Kyoung-Sun; Cho, Young-Ho 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) https://doi.org/10.1109/OMEMS.2000.879618	conference	January 2000
Gallium arsenide as a mechanical material Hjort, K.; Soderkvist, J.; Schweitz, J. -A Journal of Micromechanics and Microengineering, Vol. 4, Issue 1 https://doi.org/10.1088/0960-1317/4/1/001	journal	March 1994
Submicron, movable gallium arsenide mechanical structures and actuators Zhang, Z. L.; Porkolab, G. A.; MacDonald, N. C. [1992] Proceedings IEEE Micro Electro Mechanical Systems https://doi.org/10.1109/MEMSYS.1992.187693	conference	January 1992
Integrated electrostatic micro-switch for optical fibre networks driven by low voltage Ollier, E.; Mottier, P. Electronics Letters, Vol. 32, Issue 21 https://doi.org/10.1049/el:19961316	journal	January 1996
III–V micromachined devices for microsystems Leclercq, J. L.; Ribas, R. P.; Karam, J. M. Microelectronics Journal, Vol. 29, Issue 9, p. 613-619 https://doi.org/10.1016/S0026-2692(98)00024-X	journal	September 1998
Geometrical modulation-based interferometry for displacement sensing using optically coupled suspended waveguides Haronian, D. Journal of Microelectromechanical Systems, Vol. 7, Issue 3 https://doi.org/10.1109/84.709649	journal	January 1998
Surface-micromachined epitaxial silicon cantilevers as movable optical waveguides on silicon-on-insulator substrates Eng, Terry T. H.; Kan, Sidney C.; Wong, George K. L. Sensors and Actuators A: Physical, Vol. 49, Issue 1-2 https://doi.org/10.1016/0924-4247(96)80026-4	journal	June 1995
Sacrificial etching of III - V compounds for micromechanical devices Hjort, Klas Journal of Micromechanics and Microengineering, Vol. 6, Issue 4 https://doi.org/10.1088/0960-1317/6/4/003	journal	December 1996
Micro-opto mechanical switch integrated on silicon Revol, F.; Labeye, P.; Ollier, E. Electronics Letters, Vol. 31, Issue 23 https://doi.org/10.1049/el:19951354	journal	November 1995
Characterization of AlGaAs microstructure fabricated by AlGaAs/GaAs micromachining Uenishi, Y.; Tanaka, H.; Ukita, H. IEEE Transactions on Electron Devices, Vol. 41, Issue 10 https://doi.org/10.1109/16.324588	journal	January 1994
Micromachining and mechanical properties of GaInAs/InP microcantilevers Mounaix, P.; Delobelle, P.; Mélique, X. Materials Science and Engineering: B, Vol. 51, Issue 1-3 https://doi.org/10.1016/S0921-5107(97)00271-7	journal	February 1998

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