Charge exchange molecular ion source

Patent · 03 June 2003

OSTI ID:1174352

Vella, Michael C.

Ions, particularly molecular ions with multiple dopant nucleons per ion, are produced by charge exchange. An ion source contains a minimum of two regions separated by a physical barrier and utilizes charge exchange to enhance production of a desired ion species. The essential elements are a plasma chamber for production of ions of a first species, a physical separator, and a charge transfer chamber where ions of the first species from the plasma chamber undergo charge exchange or transfer with the reactant atom or molecules to produce ions of a second species. Molecular ions may be produced which are useful for ion implantation.

• Research Organization: The Regents of the University of California, Oakland, CA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC03-76SF00098
• Assignee: The Regents of the University of California (Oakland, CA)
• Patent Number(s): 6,573,510
• Application Number: 09/596,828
• OSTI ID: 1174352
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS