Optically transparent, scratch-resistant, diamond-like carbon coatings
A plasma-based method for the deposition of diamond-like carbon (DLC) coatings is described. The process uses a radio-frequency inductively coupled discharge to generate a plasma at relatively low gas pressures. The deposition process is environmentally friendly and scaleable to large areas, and components that have geometrically complicated surfaces can be processed. The method has been used to deposit adherent 100-400 nm thick DLC coatings on metals, glass, and polymers. These coatings are between three and four times harder than steel and are therefore scratch resistant, and transparent to visible light. Boron and silicon doping of the DLC coatings have produced coatings having improved optical properties and lower coating stress levels, but with slightly lower hardness.
- Research Organization:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-36
- Assignee:
- The Regents of the University of California (Los Alamos, NM)
- Patent Number(s):
- 6,572,935
- Application Number:
- 09/428,269
- OSTI ID:
- 1174350
- Country of Publication:
- United States
- Language:
- English
Stress and plastic flow in silicon during amorphization by ion bombardment
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journal | October 1991 |
Preparation Techniques for Diamond-Like Carbon
|
book | January 1991 |
Unhydrogenated diamond‐like carbon films prepared by dc plasma chemical vapor deposition at room temperature
|
journal | April 1991 |
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