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Title: Plasma flares in high power impulse magnetron sputtering

Authors:
; ; ;
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1172714
Report Number(s):
LBNL-6039E
DOE Contract Number:  
DE-AC02-05CH11231
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 101
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; high power impulse magnetron sputtering, plasma, instabilities

Citation Formats

Ni, Pavel A., Hornschuch, Christian, Panjan, Matjaz, and Anders, Andre. Plasma flares in high power impulse magnetron sputtering. United States: N. p., 2012. Web. doi:10.1063/1.4768925.
Ni, Pavel A., Hornschuch, Christian, Panjan, Matjaz, & Anders, Andre. Plasma flares in high power impulse magnetron sputtering. United States. doi:10.1063/1.4768925.
Ni, Pavel A., Hornschuch, Christian, Panjan, Matjaz, and Anders, Andre. Tue . "Plasma flares in high power impulse magnetron sputtering". United States. doi:10.1063/1.4768925. https://www.osti.gov/servlets/purl/1172714.
@article{osti_1172714,
title = {Plasma flares in high power impulse magnetron sputtering},
author = {Ni, Pavel A. and Hornschuch, Christian and Panjan, Matjaz and Anders, Andre},
abstractNote = {},
doi = {10.1063/1.4768925},
journal = {Applied Physics Letters},
number = ,
volume = 101,
place = {United States},
year = {2012},
month = {11}
}