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Title: Automated suppression of errors in LTP-II slope measurements of x-ray optics. Part 2: Specification for automated rotating/flipping/aligning system

Abstract

Systematic error and instrumental drift are the major limiting factors of sub-microradian slope metrology with state-of-the-art x-ray optics. Significant suppression of the errors can be achieved by using an optimal measurement strategy suggested in [Rev. Sci. Instrum. 80, 115101 (2009)]. With this series of LSBL Notes, we report on development of an automated, kinematic, rotational system that provides fully controlled flipping, tilting, and shifting of a surface under test. The system is integrated into the Advanced Light Source long trace profiler, LTP-II, allowing for complete realization of the advantages of the optimal measurement strategy method. We provide details of the system?s design, operational control and data acquisition. The high performance of the system is demonstrated via the results of high precision measurements with a spherical test mirror.

Authors:
 [1];  [1]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1170543
Report Number(s):
LBNL-5587E
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; surface slope metrology; drift error; systematic error; optimal scanning; metrology of x-ray optics; deflectometry

Citation Formats

Ali, Zulfiqar, and Yashchuk, Valeriy V. Automated suppression of errors in LTP-II slope measurements of x-ray optics. Part 2: Specification for automated rotating/flipping/aligning system. United States: N. p., 2011. Web. doi:10.2172/1170543.
Ali, Zulfiqar, & Yashchuk, Valeriy V. Automated suppression of errors in LTP-II slope measurements of x-ray optics. Part 2: Specification for automated rotating/flipping/aligning system. United States. doi:10.2172/1170543.
Ali, Zulfiqar, and Yashchuk, Valeriy V. Mon . "Automated suppression of errors in LTP-II slope measurements of x-ray optics. Part 2: Specification for automated rotating/flipping/aligning system". United States. doi:10.2172/1170543. https://www.osti.gov/servlets/purl/1170543.
@article{osti_1170543,
title = {Automated suppression of errors in LTP-II slope measurements of x-ray optics. Part 2: Specification for automated rotating/flipping/aligning system},
author = {Ali, Zulfiqar and Yashchuk, Valeriy V.},
abstractNote = {Systematic error and instrumental drift are the major limiting factors of sub-microradian slope metrology with state-of-the-art x-ray optics. Significant suppression of the errors can be achieved by using an optimal measurement strategy suggested in [Rev. Sci. Instrum. 80, 115101 (2009)]. With this series of LSBL Notes, we report on development of an automated, kinematic, rotational system that provides fully controlled flipping, tilting, and shifting of a surface under test. The system is integrated into the Advanced Light Source long trace profiler, LTP-II, allowing for complete realization of the advantages of the optimal measurement strategy method. We provide details of the system?s design, operational control and data acquisition. The high performance of the system is demonstrated via the results of high precision measurements with a spherical test mirror.},
doi = {10.2172/1170543},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2011},
month = {7}
}