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Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates

Patent ·
OSTI ID:1169084
; ; ;
The present invention provides device components geometries and fabrication strategies for enhancing the electronic performance of electronic devices based on thin films of randomly oriented or partially aligned semiconducting nanotubes. In certain aspects, devices and methods of the present invention incorporate a patterned layer of randomly oriented or partially aligned carbon nanotubes, such as one or more interconnected SWNT networks, providing a semiconductor channel exhibiting improved electronic properties relative to conventional nanotubes-based electronic systems.
Research Organization:
The Board of Trustees of the University of Illinois, Urbana, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-07ER46471
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Number(s):
8,946,683
Application Number:
12/996,924
OSTI ID:
1169084
Country of Publication:
United States
Language:
English

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Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes journal August 2005
Measurement of the quantum capacitance of interacting electrons in carbon nanotubes journal September 2006
Sorting carbon nanotubes by electronic structure using density differentiation journal October 2006
Progress in Plastic Electronics Devices journal August 2006
Field emission from carbon nanotubes for displays journal April 2000
Langmuir−Blodgett Silver Nanowire Monolayers for Molecular Sensing Using Surface-Enhanced Raman Spectroscopy journal September 2003
Electronic paper: Flexible active-matrix electronic ink display journal May 2003
Design and Performance of Inkjet Print Heads for Non-Graphic-Arts Applications journal November 2003
Chemical Etching of InGaAsP/InP DH Wafer journal January 1982
Template Synthesis of Electronically Conductive Polymer Nanostructures journal February 1995
Patterning Self-Assembled Monolayers: Applications in Materials Science journal May 1994
Patterning organic single-crystal transistor arrays journal December 2006
Band Gap Fluorescence from Individual Single-Walled Carbon Nanotubes journal July 2002
Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths journal October 1998
Hall Effect in the Accumulation Layers on the Surface of Organic Semiconductors journal November 2005
Quantifying distortions in soft lithography
  • Rogers, John A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 88-97 https://doi.org/10.1116/1.589841
journal June 1998
Purification and Characterization of Single-Wall Carbon Nanotubes (SWNTs) Obtained from the Gas-Phase Decomposition of CO (HiPco Process) journal September 2001
Atomic Force Microscopy of Atomic-Scale Ledges and Etch Pits Formed During Dissolution of Quartz journal March 1991
Growth of Au-catalyzed ordered GaAs nanowire arrays by molecular-beam epitaxy journal December 2002
Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species journal August 2001
Block copolymers as photonic bandgap materials journal November 1999
A buckling-based metrology for measuring the elastic moduli of polymeric thin films journal July 2004
High-Performance, Flexible Polymer Light-Emitting Diodes Fabricated by a Continuous Polymer Coating Process journal June 2002
Novel Nanostructures of Functional Oxides Synthesized by Thermal Evaporation journal January 2003
Nanoscale organic transistors that use source/drain electrodes supported by high resolution rubber stamps journal February 2003
Enrichment of Single-Walled Carbon Nanotubes by Diameter in Density Gradients journal April 2005
Experimental and computational studies of phase shift lithography with binary elastomeric masks
  • Maria, Joana; Malyarchuk, Viktor; White, Jeff
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 2, Article No. 828 https://doi.org/10.1116/1.2184321
journal January 2006
Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing journal February 2003
Toward Paperlike Displays journal February 2001
Organic field-effect transistors with bending radius down to 1 mm journal January 2004
Thin Film Deposition, Patterning, and Printing in Organic Thin Film Transistors journal October 2004
Nanomaterial transfer using hot embossing for flexible electronic devices journal February 2006
Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers journal September 1998
Using soft lithography to fabricate GaAs/AlGaAs heterostructure field effect transistors journal October 1997
Polymers and carbon nanotubes—dimensionality, interactions and nanotechnology journal September 2005
CVD synthesis and purification of single-walled carbon nanotubes on aerogel-supported catalyst journal March 2002
Conducting elastomer surface texturing: a path to electrode spotting journal September 2004
Semiconductor nanowires for novel one-dimensional devices journal March 2004
Pentacene thin film transistors on inorganic dielectrics: Morphology, structural properties, and electronic transport journal January 2003
Nanometer-scale crystallization of thin HfO2 films studied by HF-chemical etching journal May 2005
Electrical Characterization of Polymer-Based FETs Fabricated by Spin-Coating Poly(3-alkylthiophene)s journal November 2004
The Adhesion Between Polymers journal August 1991
High-Performance Carbon Nanotube Field-Effect Transistor With Tunable Polarities journal September 2005
Soft Lithography journal August 1998
Ink-jet printing of carbon nanotube thin film transistors journal August 2007
Guided molecular self-assembly: a review of recent efforts journal March 2003
Silicon motherboards for multichannel optical modules
  • Ambrosy, A.; Richter, H.; Hehmann, J.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A, Vol. 19, Issue 1, p. 34-40 https://doi.org/10.1109/95.486559
journal March 1996
Large-scale and low-cost synthesis of single-walled carbon nanotubes by the catalytic pyrolysis of hydrocarbons journal June 1998
Fabrication of a Cylindrical Display by Patterned Assembly journal April 2002
Printed Organic Semiconducting Devices journal July 2005
Printing meets lithography: Soft approaches to high-resolution patterning journal September 2001
Small-Angle Neutron Scattering from Surfactant-Assisted Aqueous Dispersions of Carbon Nanotubes
  • Yurekli, Koray; Mitchell, Cynthia A.; Krishnamoorti, Ramanan
  • Journal of the American Chemical Society, Vol. 126, Issue 32, p. 9902-9903 https://doi.org/10.1021/ja047451u
journal August 2004
Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps journal October 2004
Printed Multilayer Superstructures of Aligned Single-Walled Carbon Nanotubes for Electronic Applications journal November 2007
Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing journal October 2004
Polymer-on-Polymer Stamping: Universal Approaches to Chemically Patterned Surfaces journal April 2002
On-chip natural assembly of silicon photonic bandgap crystals journal November 2001
Ballistic carbon nanotube field-effect transistors journal August 2003
Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane) journal October 1998
Functional Pixel Circuits for Elastic AMOLED Displays journal July 2005
Field Configured Assembly: Programmed Manipulation and Self-assembly at the Mesoscale journal May 2004
Some properties of spherical and rod-shaped semiconductor and metal nanocrystals journal January 2002
Electrical Contacts to Molecular Layers by Nanotransfer Printing journal July 2003
Mixed Mode Cracking in Layered Materials book January 1991
Self-organizing high-density single-walled carbon nanotube arrays from surfactant suspensions journal August 2004
Printed plastic electronics and paperlike displays journal August 2002
Scalable Interconnection and Integration of Nanowire Devices without Registration journal May 2004
Flexible substrate micro-crystalline silicon and gated amorphous silicon strain sensors journal February 2006
GaN: Processing, defects, and devices journal July 1999
Preferential Growth of Semiconducting Single-Walled Carbon Nanotubes by a Plasma Enhanced CVD Method journal February 2004
Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon journal January 2008
The path to ubiquitous and low-cost organic electronic appliances on plastic journal April 2004
Percolation in Transparent and Conducting Carbon Nanotube Networks journal December 2004
Amorphous Si TFTs on plastically deformed spherical domes journal April 2002
New Realization Method for Three-Dimensional Photonic Crystal in Optical Wavelength Region journal July 1996
Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM journal December 2000
Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing journal September 2003
Nanolithography based on patterned metal transfer and its application to organic electronic devices journal May 2002
High-mobility carbon-nanotube thin-film transistors on a polymeric substrate journal January 2005
Spatially Selective Guided Growth of High-Coverage Arrays and Random Networks of Single-Walled Carbon Nanotubes and Their Integration into Electronic Devices journal April 2006
Atomic Layer Deposition of Hafnium and Zirconium Oxides Using Metal Amide Precursors journal October 2002
Advances in organic field-effect transistors journal November 2004
Intermetallic formation in gold-aluminum systems journal October 1970
Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates journal October 2005
Ordering of Spontaneously Formed Buckles on Planar Surfaces journal April 2000
Single Etch Patterning of Stacked Silver and Molybdenum Alloy Layers on Glass Using Microcontact Wave Printing
  • Burdinski, Dirk; Brans, Harold J. A.; Decre, Michel M. J.
  • Journal of the American Chemical Society, Vol. 127, Issue 31, p. 10786-10787 https://doi.org/10.1021/ja0523791
journal August 2005
Colloidal nanocrystal heterostructures with linear and branched topology journal July 2004
Large Scale CVD Synthesis of Single-Walled Carbon Nanotubes journal August 1999
High Performance n-Type Carbon Nanotube Field-Effect Transistors with Chemically Doped Contacts journal February 2005
Nanotube Optoelectronic Memory Devices journal September 2004
Colloidal Inks for Directed Assembly of 3-D Periodic Structures journal July 2002
Growth, branching, and kinking of molecular-beam epitaxial <110> GaAs nanowires journal October 2003
Effect of Mechanical and Electrical Stresses on the Performance of an a-Si:H TFT on Plastic Substrate journal January 2004
Chemistry and Physics in One Dimension: Synthesis and Properties of Nanowires and Nanotubes journal February 1999
High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes journal March 2007
Low-voltage and high-field-effect mobility organic transistors with a polymer insulator journal February 2006
High-frequency ultrasound array element using thermoelastic expansion in an elastomeric film journal July 2001
Porous silica via colloidal crystallization journal October 1997
Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping journal March 2000
Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ‘‘ink’’ followed by chemical etching journal October 1993
Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates journal April 2005
Holographic photonic crystals with diamond symmetry journal November 2003
Hole mobility in organic single crystals measured by a “flip-crystal” field-effect technique journal August 2004
Flexible a-Si:H Position-Sensitive Detectors journal July 2005
Long and Oriented Single-Walled Carbon Nanotubes Grown by Ethanol Chemical Vapor Deposition journal October 2004
Nanotechnology: High-speed integrated nanowire circuits journal April 2005
Interfacial Chemistries for Nanoscale Transfer Printing journal July 2002
Correlation of buffer strain relaxation modes with transport properties of two‐dimensional electron gases journal December 1996
Guided Growth of Large-Scale, Horizontally Aligned Arrays of Single-Walled Carbon Nanotubes and Their Use in Thin-Film Transistors journal August 2005

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