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Title: Replication of patterned thin-film structures for use in plasmonics and metamaterials

Patent ·
OSTI ID:1169060

The present invention provides templating methods for replicating patterned metal films from a template substrate such as for use in plasmonic devices and metamaterials. Advantageously, the template substrate is reusable and can provide plural copies of the structure of the template substrate. Because high-quality substrates that are inherently smooth and flat are available, patterned metal films in accordance with the present invention can advantageously provide surfaces that replicate the surface characteristics of the template substrate both in the patterned regions and in the unpatterned regions.

Research Organization:
Univ. of Minnesota, Minneapolis, MN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-06ER46438
Assignee:
Regents of the University of Minnesota (St. Paul, MN)
Patent Number(s):
8,948,562
Application Number:
13/131,197
OSTI ID:
1169060
Country of Publication:
United States
Language:
English

References (9)

Three-dimensionally patterned materials and methods for manufacturing same using nanocrystals patent October 2000
Metallic building element for optoelectronics patent February 2003
Decal transfer microfabrication patent October 2004
Photodiode and method for fabricating same patent June 2010
Method for fabricating photodiodes patent February 2011
Method for fabricating color filter using surface plasmon and method for fabricating liquid crystal display device patent August 2011
Waterproof stretchable optoelectronics patent-application June 2012
Photoplastic near-field optical probe with sub-100 nm aperture made by replication from a nanomould: PHOTOPLASTIC NEAR-FIELD OPTICAL PROBE journal March 2003
Templated Fabrication of Periodic Metallic Nanopyramid Arrays journal September 2007

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