skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Device for calorimetric measurement

Abstract

In one aspect, provided herein is a single crystal silicon microcalorimeter, for example useful for high temperature operation and long-term stability of calorimetric measurements. Microcalorimeters described herein include microcalorimeter embodiments having a suspended structure and comprising single crystal silicon. Also provided herein are methods for making calorimetric measurements, for example, on small quantities of materials or for determining the energy content of combustible material having an unknown composition.

Inventors:
;
Publication Date:
Research Org.:
The Board of Trustees of the University of Illinois, Urbana, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1167226
Patent Number(s):
8,931,950
Application Number:
13/059,812
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL) OSTI
DOE Contract Number:  
B568604
Resource Type:
Patent
Resource Relation:
Patent File Date: 2009 Aug 20
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 36 MATERIALS SCIENCE

Citation Formats

King, William P, and Lee, Jungchul. Device for calorimetric measurement. United States: N. p., 2015. Web.
King, William P, & Lee, Jungchul. Device for calorimetric measurement. United States.
King, William P, and Lee, Jungchul. Tue . "Device for calorimetric measurement". United States. doi:. https://www.osti.gov/servlets/purl/1167226.
@article{osti_1167226,
title = {Device for calorimetric measurement},
author = {King, William P and Lee, Jungchul},
abstractNote = {In one aspect, provided herein is a single crystal silicon microcalorimeter, for example useful for high temperature operation and long-term stability of calorimetric measurements. Microcalorimeters described herein include microcalorimeter embodiments having a suspended structure and comprising single crystal silicon. Also provided herein are methods for making calorimetric measurements, for example, on small quantities of materials or for determining the energy content of combustible material having an unknown composition.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 13 00:00:00 EST 2015},
month = {Tue Jan 13 00:00:00 EST 2015}
}

Patent:

Save / Share:

Works referenced in this record:

Micro-hotplates—A platform for micro-solid oxide fuel cells
journal, March 2007


High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications
journal, April 2006

  • Belmonte, J. Cerdà; Puigcorbé, J.; Arbiol, J.
  • Sensors and Actuators B: Chemical, Vol. 114, Issue 2, p. 826-835
  • DOI: 10.1016/j.snb.2005.07.057

Micromechanical thermogravimetry
journal, September 1998


Using a Microcantilever Array for Detecting Phase Transitions and Stability of DNA
journal, March 2007

  • Biswal, Sibani Lisa; Raorane, Digvijay; Chaiken, Alison
  • Clinics in Laboratory Medicine, Vol. 27, Issue 1, p. 163-171
  • DOI: 10.1016/j.cll.2006.12.005

Environmental sensors based on micromachined cantilevers with integrated read-out
journal, February 2000


Micro-differential scanning calorimeter for combustible gas sensing
journal, January 2004


Si field emitter arrays coated with thin ferroelectric films
journal, May 2008


Enhancement of Ferroelectricity in Strained BaTiO3 Thin Films
journal, November 2004


Nanoscale Domain Control in Multiferroic BiFeO3 Thin Films
journal, September 2006

  • Chu, Y.-H.; Zhan, Q.; Martin, L. W.
  • Advanced Materials, Vol. 18, Issue 17, p. 2307-2311
  • DOI: 10.1002/adma.200601098

Domain Control in Multiferroic BiFeO3 through Substrate Vicinality
journal, September 2007

  • Chu, Y.-H.; Cruz, M. P.; Yang, C.-H.
  • Advanced Materials, Vol. 19, Issue 18, p. 2662-2666
  • DOI: 10.1002/adma.200602972

Electric-field control of local ferromagnetism using a magnetoelectric multiferroic
journal, April 2008

  • Chu, Ying-Hao; Martin, Lane W.; Holcomb, Mikel B.
  • Nature Materials, Vol. 7, Issue 6, p. 478-482
  • DOI: 10.1038/nmat2184

Nanoscale Structure and Mechanism for Enhanced Electromechanical Response of Highly Strained BiFeO3 Thin Films
journal, May 2011

  • Damodaran, Anoop R.; Liang, Chen-Wei; He, Qing
  • Advanced Materials, Vol. 23, Issue 28, p. 3170-3175
  • DOI: 10.1002/adma.201101164

Theoretical study of an absorbing sample in infrared near-field spectromicroscopy
journal, May 2004


Subwavelength infrared spectromicroscopy using an AFM as a local absorption sensor
journal, September 2006


Analysis of nano-chemical mapping performed by an AFM-based (“AFMIR”) acousto-optic technique
journal, November 2007


Thin film microcalorimeter for heat capacity measurements from 1.5 to 800 K
journal, April 1994

  • Denlinger, D. W.; Abarra, E. N.; Allen, Kimberly
  • Review of Scientific Instruments, Vol. 65, Issue 4, p. 946-959
  • DOI: 10.1063/1.1144925

VLSI-NEMS chip for parallel AFM data storage
journal, March 2000


Cantilevers with nano-heaters for thermomechanical storage application
journal, June 2003


Porous silicon bulk micromachining for thermally isolated membrane formation
journal, May 1997


Glass transition of thin films of poly(2-vinyl pyridine) and poly(methyl methacrylate): nanocalorimetry measurements
journal, June 2003


Polysilicon: a versatile material for microsystems
journal, April 2002


Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications
journal, June 1996

  • Fung, Samuel K. H.; Tang, Zhenan; Chan, Philip C. H.
  • Sensors and Actuators A: Physical, Vol. 54, Issue 1-3, p. 482-487
  • DOI: 10.1016/S0924-4247(97)80008-8

Thermal characterisation of micro-hotplates used in sensor structures
journal, March 2004

  • Fürjes, P.; Dücső, Cs.; Ádám, M.
  • Superlattices and Microstructures, Vol. 35, Issue 3-6, p. 455-464
  • DOI: 10.1016/j.spmi.2003.09.007

Thermal investigation of micro-filament heaters
journal, April 2002


Observation of a chemical reaction using a micromechanical sensor
journal, January 1994


Microcantilever hotplates with temperature-compensated piezoresistive strain sensors
journal, May 2008

  • Goericke, Fabian; Lee, Jungchul; King, William P.
  • Sensors and Actuators A: Physical, Vol. 143, Issue 2, p. 181-190
  • DOI: 10.1016/j.sna.2007.10.049

A monolithic integrated 4×4 tin oxide gas sensor array with on-chip multiplexing and differential readout circuits
journal, January 2007

  • Guo, Bin; Bermak, Amine; Chan, Philip C. H.
  • Solid-State Electronics, Vol. 51, Issue 1, p. 69-76
  • DOI: 10.1016/j.sse.2006.10.015

Size effect on heat transfer in micro gas sensors
journal, May 2005

  • Han, M. H.; Liang, Xin-Gang; Tang, Z. A.
  • Sensors and Actuators A: Physical, Vol. 120, Issue 2, p. 397-402
  • DOI: 10.1016/j.sna.2004.12.031

Cubic AgPbmSbTe2+m: Bulk Thermoelectric Materials with High Figure of Merit
journal, February 2004


Investigation of the natural convection boundary condition in microfabricated structures
journal, July 2008


Applications of simultaneous DSC/FTIR analysis
journal, January 1992


Nanotopographical imaging using a heated atomic force microscope cantilever probe
journal, May 2007

  • Kim, K. J.; Park, K.; Lee, J.
  • Sensors and Actuators A: Physical, Vol. 136, Issue 1, p. 95-103
  • DOI: 10.1016/j.sna.2006.10.052

Thermal conduction between a heated microcantilever and a surrounding air environment
journal, June 2009


A low power integrated catalytic gas sensor
journal, May 1993


Classifying combustible gases using micro-gas sensor array
journal, August 2003


Characterization of liquid and gaseous micro- and nanojets using microcantilever sensors
journal, February 2007

  • Lee, Jungchul; Naeli, Kianoush; Hunter, Hanif
  • Sensors and Actuators A: Physical, Vol. 134, Issue 1, p. 128-139
  • DOI: 10.1016/j.sna.2006.05.014

Microcantilever hotplates: Design, fabrication, and characterization
journal, May 2007

  • Lee, Jungchul; King, William P.
  • Sensors and Actuators A: Physical, Vol. 136, Issue 1, p. 291-298
  • DOI: 10.1016/j.sna.2006.10.051

Phase change and cooling characteristics of microjets measured using microcantilever heaters
journal, September 2008

  • Lee, Jungchul; Hunter, Hanif; Glezer, Ari
  • Sensors and Actuators A: Physical, Vol. 147, Issue 1, p. 64-69
  • DOI: 10.1016/j.sna.2008.03.022

A microsensor array with porous tin oxide thin films and microhotplate dangled by wires in air
journal, March 2002

  • Lee, Dae-Sik; Shim, Chang-Hyun; Lim, Jun-Woo
  • Sensors and Actuators B: Chemical, Vol. 83, Issue 1-3, p. 250-255
  • DOI: 10.1016/S0925-4005(01)01057-7

5×5 2D AFM cantilever arrays a first step towards a Terabit storage device
journal, March 1999


Temperature calibration of heated silicon atomic force microscope cantilevers
journal, October 2007


Silicon microcantilever hotplates with high temperature uniformity
journal, June 2009

  • Privorotskaya, Natalya L.; King, William P.
  • Sensors and Actuators A: Physical, Vol. 152, Issue 2, p. 160-167
  • DOI: 10.1016/j.sna.2009.03.020

Quantitative determination of contact stiffness using atomic force acoustic microscopy
journal, March 2000


Optimised cantilever biosensor with piezoresistive read-out
journal, October 2003


Electron emission from ferroelectrics - a review
journal, February 1994

  • Riege, H.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 340, Issue 1, p. 80-89
  • DOI: 10.1016/0168-9002(94)91282-3

High-resolution imaging of elastic properties using harmonic cantilevers
journal, September 2004

  • Sahin, O.; Yaralioglu, G.; Grow, R.
  • Sensors and Actuators A: Physical, Vol. 114, Issue 2-3, p. 183-190
  • DOI: 10.1016/j.sna.2003.11.031

A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering
journal, June 1998


A modular system of SiC-based microhotplates for the application in metal oxide gas sensors
journal, June 2000


SnO2:Sb – A new material for high-temperature MEMS heater applications: Performance and limitations
journal, June 2007

  • Spannhake, J.; Helwig, A.; Müller, G.
  • Sensors and Actuators B: Chemical, Vol. 124, Issue 2, p. 421-428
  • DOI: 10.1016/j.snb.2007.01.004

Alternative micro-hotplate design for low power sensor arrays
journal, April 2006

  • Triantafyllopoulou, R.; Chatzandroulis, S.; Tsamis, C.
  • Microelectronic Engineering, Vol. 83, Issue 4-9, p. 1189-1191
  • DOI: 10.1016/j.mee.2006.01.224

Thermal properties of suspended porous silicon micro-hotplates for sensor applications
journal, October 2003

  • Tsamis, C.; Nassiopoulou, A. G.; Tserepi, A.
  • Sensors and Actuators B: Chemical, Vol. 95, Issue 1-3, p. 78-82
  • DOI: 10.1016/S0925-4005(03)00409-X

Design and simulations of SOI CMOS micro-hotplate gas sensors
journal, August 2001


Scanning Joule expansion microscopy at nanometer scales
journal, January 1998

  • Varesi, J.; Majumdar, A.
  • Applied Physics Letters, Vol. 72, Issue 1, p. 37-39
  • DOI: 10.1063/1.120638

Thermal analysis of silicon carbide based micro hotplates for metal oxide gas sensors
journal, September 2005


Nano-mechanical electro-thermal probe array used for high-density storage based on NEMS technology
journal, May 2006


A Strain-Driven Morphotropic Phase Boundary in BiFeO3
journal, November 2009

  • Zeches, R. J.; Rossell, M. D.; Zhang, J. X.
  • Science, Vol. 326, Issue 5955, p. 977-980
  • DOI: 10.1126/science.1177046

Large field-induced strains in a lead-free piezoelectric material
journal, January 2011

  • Zhang, J. X.; Xiang, B.; He, Q.
  • Nature Nanotechnology, Vol. 6, Issue 2, p. 98-102
  • DOI: 10.1038/nnano.2010.265

A micro-Pirani vacuum gauge based on micro-hotplate technology
journal, February 2006

  • Zhang, F. T.; Tang, Z.; Yu, J.
  • Sensors and Actuators A: Physical, Vol. 126, Issue 2, p. 300-305
  • DOI: 10.1016/j.sna.2005.10.016

Fractured polymer/silica fiber surface studied by tapping mode atomic force microscopy
journal, June 1993