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Title: System and method for compressive scanning electron microscopy

Abstract

A scanning transmission electron microscopy (STEM) system is disclosed. The system may make use of an electron beam scanning system configured to generate a plurality of electron beam scans over substantially an entire sample, with each scan varying in electron-illumination intensity over a course of the scan. A signal acquisition system may be used for obtaining at least one of an image, a diffraction pattern, or a spectrum from the scans, the image, diffraction pattern, or spectrum representing only information from at least one of a select subplurality or linear combination of all pixel locations comprising the image. A dataset may be produced from the information. A subsystem may be used for mathematically analyzing the dataset to predict actual information that would have been produced by each pixel location of the image.

Inventors:
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1167207
Patent Number(s):
8,933,401
Application Number:
14/063,319
Assignee:
awrence Livermore National Security, LLC (Livermore, CA) LLNL
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Oct 25
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Citation Formats

Reed, Bryan W. System and method for compressive scanning electron microscopy. United States: N. p., 2015. Web.
Reed, Bryan W. System and method for compressive scanning electron microscopy. United States.
Reed, Bryan W. Tue . "System and method for compressive scanning electron microscopy". United States. doi:. https://www.osti.gov/servlets/purl/1167207.
@article{osti_1167207,
title = {System and method for compressive scanning electron microscopy},
author = {Reed, Bryan W},
abstractNote = {A scanning transmission electron microscopy (STEM) system is disclosed. The system may make use of an electron beam scanning system configured to generate a plurality of electron beam scans over substantially an entire sample, with each scan varying in electron-illumination intensity over a course of the scan. A signal acquisition system may be used for obtaining at least one of an image, a diffraction pattern, or a spectrum from the scans, the image, diffraction pattern, or spectrum representing only information from at least one of a select subplurality or linear combination of all pixel locations comprising the image. A dataset may be produced from the information. A subsystem may be used for mathematically analyzing the dataset to predict actual information that would have been produced by each pixel location of the image.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 13 00:00:00 EST 2015},
month = {Tue Jan 13 00:00:00 EST 2015}
}

Patent:

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Works referenced in this record:

Robust uncertainty principles: exact signal reconstruction from highly incomplete frequency information
journal, February 2006

  • Candes, E.J.; Romberg, J.; Tao, T.
  • IEEE Transactions on Information Theory, Vol. 52, Issue 2, p. 489-509
  • DOI: 10.1109/TIT.2005.862083

Near-Optimal Signal Recovery From Random Projections: Universal Encoding Strategies?
journal, January 2006

  • Candes, Emmanuel J.; Tao, Terence
  • IEEE Transactions on Information Theory, Vol. 52, Issue 12, p. 5406-5425
  • DOI: 10.1109/TIT.2006.885507

Mapping chemical and bonding information using multivariate analysis of electron energy-loss spectrum images
journal, October 2006


Unconventional immuno double labelling by energy filtered transmission electron microscopy
journal, January 1996


Multivariate statistics applications in phase analysis of STEM-EDS spectrum images
journal, January 2010


Point defect characterization in HAADF-STEM images using multivariate statistical analysis
journal, February 2011


Boron segregation to austenite grain boundary in low alloy steel measured by aberration corrected STEM–EELS
journal, October 2012

  • Shigesato, Genichi; Fujishiro, Taishi; Hara, Takuya
  • Materials Science and Engineering: A, Vol. 556, p. 358-365
  • DOI: 10.1016/j.msea.2012.06.099

EDX spectrum modelling and multivariate analysis of sub-nanometer segregation
journal, April 1999


Extracting physically interpretable data from electron energy-loss spectra
journal, October 2010


Observation of three-dimensional elemental distributions of a Si device using a 360°-tilt FIB and the cold field-emission STEM system
journal, November 2008


Dose-limited spectroscopic imaging of soft materials by low-loss EELS in the scanning transmission electron microscope
journal, August 2008


Analysis of EEL spectrum of low-loss region using the Cs-corrected STEM–EELS method and multivariate analysis
journal, April 2011


EEL spectroscopic tomography: Towards a new dimension in nanomaterials analysis
journal, November 2012