System and method for compressive scanning electron microscopy

Reed, Bryan W

System and method for compressive scanning electron microscopy

Patent · 12 January 2015

OSTI ID:1167207

Reed, Bryan W

A scanning transmission electron microscopy (STEM) system is disclosed. The system may make use of an electron beam scanning system configured to generate a plurality of electron beam scans over substantially an entire sample, with each scan varying in electron-illumination intensity over a course of the scan. A signal acquisition system may be used for obtaining at least one of an image, a diffraction pattern, or a spectrum from the scans, the image, diffraction pattern, or spectrum representing only information from at least one of a select subplurality or linear combination of all pixel locations comprising the image. A dataset may be produced from the information. A subsystem may be used for mathematically analyzing the dataset to predict actual information that would have been produced by each pixel location of the image.

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Research Organization:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC52-07NA27344

Assignee:: awrence Livermore National Security, LLC (Livermore, CA)

Patent Number(s):: 8,933,401

Application Number:: 14/063,319

OSTI ID:: 1167207

Country of Publication:: United States

Language:: English

References (31)

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