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Title: Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere

Abstract

We have demonstrated that a surface acoustic wave (SAW) sensor coated with a nanoporous framework material (NFM) film can perform ultrasensitive water vapor detection at concentrations in air from 0.05 to 12,000 ppmv at 1 atmosphere pressure. The method is extendable to other MEMS-based sensors, such as microcantilevers, or to quartz crystal microbalance sensors. We identify a specific NFM that provides high sensitivity and selectivity to water vapor. However, our approach is generalizable to detection of other species using NFM to provide sensitivity and selectivity.

Inventors:
;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1165139
Patent Number(s):
8,904,850
Application Number:
13/253,274
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011 Oct 05
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 54 ENVIRONMENTAL SCIENCES; 47 OTHER INSTRUMENTATION

Citation Formats

Allendorf, Mark D, and Robinson, Alex L. Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere. United States: N. p., 2014. Web.
Allendorf, Mark D, & Robinson, Alex L. Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere. United States.
Allendorf, Mark D, and Robinson, Alex L. Tue . "Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere". United States. https://www.osti.gov/servlets/purl/1165139.
@article{osti_1165139,
title = {Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere},
author = {Allendorf, Mark D and Robinson, Alex L},
abstractNote = {We have demonstrated that a surface acoustic wave (SAW) sensor coated with a nanoporous framework material (NFM) film can perform ultrasensitive water vapor detection at concentrations in air from 0.05 to 12,000 ppmv at 1 atmosphere pressure. The method is extendable to other MEMS-based sensors, such as microcantilevers, or to quartz crystal microbalance sensors. We identify a specific NFM that provides high sensitivity and selectivity to water vapor. However, our approach is generalizable to detection of other species using NFM to provide sensitivity and selectivity.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {12}
}

Patent:

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