Thin Film Ni-Si Solid-state Reactions: Phase Formation Sequence on Amorphized Si
Journal Article
·
· Journal of Vacuum Sci. and Tech. B: Microelect. and Nanometer Structure
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOE SC OFFICE OF SCIENCE (SC)
- DOE Contract Number:
- DE-AC02-98CH10886
- OSTI ID:
- 1163017
- Report Number(s):
- BNL-106963-2014-JA
- Journal Information:
- Journal of Vacuum Sci. and Tech. B: Microelect. and Nanometer Structure, Vol. 31, Issue 5; ISSN 2166-2746
- Country of Publication:
- United States
- Language:
- English
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