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Title: Characterization of Room Temperature Recrystallization Kinetics in Electroplated Copper Films With Concurrent X-ray Diffraction and Electrical Resistivity Measurements

Authors:
; ; ; ; ; ; ;
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE SC OFFICE OF SCIENCE (SC)
OSTI Identifier:
1162471
Report Number(s):
BNL-106415-2014-JA
Journal ID: ISSN 0021-8979
DOE Contract Number:  
DE-AC02-98CH10886
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 113; Journal Issue: 21; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English

Citation Formats

Treger, M., Witt, C., Cabral, C., Murray, C., Jordan-Sweet, J., Rosenberg, R., Eisenbraun, E., and Noyan, I. Characterization of Room Temperature Recrystallization Kinetics in Electroplated Copper Films With Concurrent X-ray Diffraction and Electrical Resistivity Measurements. United States: N. p., 2013. Web. doi:10.1063/1.4807899.
Treger, M., Witt, C., Cabral, C., Murray, C., Jordan-Sweet, J., Rosenberg, R., Eisenbraun, E., & Noyan, I. Characterization of Room Temperature Recrystallization Kinetics in Electroplated Copper Films With Concurrent X-ray Diffraction and Electrical Resistivity Measurements. United States. doi:10.1063/1.4807899.
Treger, M., Witt, C., Cabral, C., Murray, C., Jordan-Sweet, J., Rosenberg, R., Eisenbraun, E., and Noyan, I. Tue . "Characterization of Room Temperature Recrystallization Kinetics in Electroplated Copper Films With Concurrent X-ray Diffraction and Electrical Resistivity Measurements". United States. doi:10.1063/1.4807899.
@article{osti_1162471,
title = {Characterization of Room Temperature Recrystallization Kinetics in Electroplated Copper Films With Concurrent X-ray Diffraction and Electrical Resistivity Measurements},
author = {Treger, M. and Witt, C. and Cabral, C. and Murray, C. and Jordan-Sweet, J. and Rosenberg, R. and Eisenbraun, E. and Noyan, I.},
abstractNote = {},
doi = {10.1063/1.4807899},
journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 21,
volume = 113,
place = {United States},
year = {2013},
month = {1}
}