Characterization of Threading Dislocations in PVT-Grown AlN Substrates via x-Ray Topography and Ray Tracing Simulation
Journal Article
·
· J. Electro. Mater.
- NCSU
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
- Sponsoring Organization:
- INDUSTRY
- OSTI ID:
- 1162304
- Journal Information:
- J. Electro. Mater., Vol. 43, Issue (4) ; 04, 2014
- Country of Publication:
- United States
- Language:
- ENGLISH
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