CRADA Final Report: Development of Negative Heavy Ions for Ion Implantation
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Accelerator & Fusion Research Division
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 1157028
- Report Number(s):
- LBNL-6736E
- Country of Publication:
- United States
- Language:
- English
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