Metal-semiconductor-metal ion-implanted Si waveguide photodetectors for C-band operation
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials (CFN)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- DOE Contract Number:
- DE-AC02-98CH10886
- OSTI ID:
- 1149901
- Report Number(s):
- BNL-105536-2014-JA; R&D Project: 16062; KC0403020
- Journal Information:
- Optics Express, Vol. 22, Issue 8
- Country of Publication:
- United States
- Language:
- English
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