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Title: Nano-Scale Wear Mechanisms in Polysilicon for MEMS Applications.

Abstract

Abstract not provided.

Authors:
; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1148426
Report Number(s):
SAND2007-2111C
523361
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the Materials Research Society Spring Meeting held April 9-13, 2007 in San Francisco, CA.
Country of Publication:
United States
Language:
English

Citation Formats

Dugger, Michael Thomas, Stach, E.A., Ritchie, R.O., and Alsem, D.H. Nano-Scale Wear Mechanisms in Polysilicon for MEMS Applications.. United States: N. p., 2007. Web.
Dugger, Michael Thomas, Stach, E.A., Ritchie, R.O., & Alsem, D.H. Nano-Scale Wear Mechanisms in Polysilicon for MEMS Applications.. United States.
Dugger, Michael Thomas, Stach, E.A., Ritchie, R.O., and Alsem, D.H. Sun . "Nano-Scale Wear Mechanisms in Polysilicon for MEMS Applications.". United States. doi:. https://www.osti.gov/servlets/purl/1148426.
@article{osti_1148426,
title = {Nano-Scale Wear Mechanisms in Polysilicon for MEMS Applications.},
author = {Dugger, Michael Thomas and Stach, E.A. and Ritchie, R.O. and Alsem, D.H.},
abstractNote = {Abstract not provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Apr 01 00:00:00 EDT 2007},
month = {Sun Apr 01 00:00:00 EDT 2007}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

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