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Title: Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.

Abstract

Abstract not provided.

Authors:
; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1147804
Report Number(s):
SAND2007-3340C
523075
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the IEEE Frequency Control Symposium held May 28 - June 1, 2007 in Geneva, Switzerland.
Country of Publication:
United States
Language:
English

Citation Formats

Olsson, Roy H.,, Wojciechowski, Kenneth., Baker, Michael, Tuck, Melanie R., and Jim Fleming. Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.. United States: N. p., 2007. Web.
Olsson, Roy H.,, Wojciechowski, Kenneth., Baker, Michael, Tuck, Melanie R., & Jim Fleming. Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.. United States.
Olsson, Roy H.,, Wojciechowski, Kenneth., Baker, Michael, Tuck, Melanie R., and Jim Fleming. Tue . "Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.". United States. doi:. https://www.osti.gov/servlets/purl/1147804.
@article{osti_1147804,
title = {Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.},
author = {Olsson, Roy H., and Wojciechowski, Kenneth. and Baker, Michael and Tuck, Melanie R. and Jim Fleming},
abstractNote = {Abstract not provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 01 00:00:00 EDT 2007},
month = {Tue May 01 00:00:00 EDT 2007}
}

Conference:
Other availability
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