skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Nanomechanical testing system

Patent ·
OSTI ID:1143650
; ; ; ; ; ;

An automated testing system includes systems and methods to facilitate inline production testing of samples at a micro (multiple microns) or less scale with a mechanical testing instrument. In an example, the system includes a probe changing assembly for coupling and decoupling a probe of the instrument. The probe changing assembly includes a probe change unit configured to grasp one of a plurality of probes in a probe magazine and couple one of the probes with an instrument probe receptacle. An actuator is coupled with the probe change unit, and the actuator is configured to move and align the probe change unit with the probe magazine and the instrument probe receptacle. In another example, the automated testing system includes a multiple degree of freedom stage for aligning a sample testing location with the instrument. The stage includes a sample stage and a stage actuator assembly including translational and rotational actuators.

Research Organization:
Hysitron, Inc., Eden Prairie, MN (USA)
Sponsoring Organization:
USDOE
DOE Contract Number:
SC0002722
Assignee:
Hysitron, Inc. (Eden Prairie, MN)
Patent Number(s):
8,770,036
Application Number:
13/962,865
OSTI ID:
1143650
Country of Publication:
United States
Language:
English

References (31)

Fastener placing apparatus patent February 1978
Method and apparatus for testing the operability of a probe patent September 1987
Method and apparatus for separating fixture-induced error from measured object characteristics and for compensating the measured object characteristic with the error, and a bow/warp station implementing same patent June 1988
Wafer prober patent September 1989
Cops preparation station patent October 1991
Load-lock unit and wafer transfer system patent August 1994
Wafer testing and self-calibration system patent June 1997
Multi-direction optical data port patent March 1998
Wafer prober having sub-micron alignment accuracy patent June 1998
Optical coordinate measuring machines and optical touch probes patent October 1998
Measurement probe system with EOS/ESD protection patent May 2004
System and method for finding the center of rotation of an R-theta stage patent June 2004
Differential measurement probe having retractable double cushioned variable spacing probing tips with EOS/ESD protection capabilities patent January 2007
Combined test instrument probe and voltage detector patent July 2007
Manipulator for rotating and translating a sample holder patent February 2011
Power ratchet wrench patent-application December 2002
Ratchet wrench patent-application September 2005
Torque-limited electrical connector patent-application March 2006
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them patent-application June 2006
Procedure for reproduction of a calibration position of an aligned and afterwards displaced calibration substrate in a probe station patent-application September 2006
Roughness measuring instrument with testing standard patent-application March 2007
Wafer measurement system and apparatus patent-application June 2007
Nanoindenter patent-application October 2007
Methods and Apparatus for Applying Torque and Rotation to Connections patent-application February 2008
Apparatus for sample preparation patent-application May 2008
Tool with end effector force limiter patent-application October 2008
Method for Scanning a Surface with the Aid of a Coordinate Measuring Machine and Coordinate Measuring Machine patent-application December 2008
Methods and instruments for materials testing patent-application March 2009
High Temperature Range Electrical Circuit Testing patent-application May 2009
Stress Micro Mechanical Test Cell, Device, System and Methods patent-application April 2010
Nanomechanical characterisation of solid surfaces and thin films journal June 2003

Cited By (5)

System for the combined, probe-based mechanical and electrical testing of MEMS patent February 2017
Sample distribution in a method for isolating analytes in fluid samples in an automated system patent July 2016
Temperature and humidity chamber patent July 2015
Nanomechanical testing system patent February 2015
Nanomechanical testing system patent January 2015

Similar Records

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY