MEMS Reliability: Where are we now?.
Conference
·
OSTI ID:1141293
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1141293
- Report Number(s):
- SAND2009-5732C; 506649
- Resource Relation:
- Conference: Proposed for presentation at the European Symposium on Reliability of Electron Devices, Failure Phsics and Analysis held October 5-9, 2009 in Arcachon, France.
- Country of Publication:
- United States
- Language:
- English
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