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Title: Stretchable form of single crystal silicon for high performance electronics on rubber substrates

Patent ·
OSTI ID:1134327
; ; ;

The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.

Research Organization:
University of Illinois, Urbana, IL (USA)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-91ER45439
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Number(s):
8,754,396
Application Number:
13/441,618
OSTI ID:
1134327
Resource Relation:
Patent File Date: 2012 Apr 06
Country of Publication:
United States
Language:
English

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Lateral polysilicon p+–p–n+ and p+–n–n+ diodes journal April 2003
Multiple Lateral Polysilicon Diodes as Temperature Sensors for Chemical Microreaction Systems journal March 2003
The Characteristic Improvement of Si(111) Metal–Oxide–Semiconductor Field-Effect Transistor by Long-Time Hydrogen Annealing journal October 2004
Synthetic Chemistry for Ultrapure, Processable, and High-Mobility Organic Transistor Semiconductors journal March 2001
Recent Advances in Semiconductor Performance and Printing Processes for Organic Transistor-Based Electronics journal October 2004
Finer features for functional microdevices journal August 2001
Vertical Etching of Silicon at very High Aspect Ratios journal August 1979
High electron mobility transistor based on a GaN‐AlxGa 1−xN heterojunction journal August 1993
A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates journal January 2006
Invention of the integrated circuit journal July 1976
Field emission from carbon nanotubes for displays journal April 2000
Nanolithography based on patterned metal transfer and its application to organic electronic devices journal May 2002
Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates journal July 2003
Optimized Structural Designs for Stretchable Silicon Integrated Circuits journal December 2009
Stretchable and Foldable Silicon Integrated Circuits journal April 2008
Materials and noncoplanar mesh designs for integrated circuits with linear elastic responses to extreme mechanical deformations journal November 2008
Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon journal January 2008
Direct observation of electron emission site on boron-doped polycrystalline diamond thin films using an ultra-high-vacuum scanning tunneling microscope journal November 1999
Organic TFT Array on a Paper Substrate journal October 2004
Highly Emissive Self-assembled Organic Nanoparticles having Dual Color Capacity for Targeted Immunofluorescence Labeling journal March 2008
Ultrathin Silicon Circuits With Strain-Isolation Layers and Mesh Layouts for High-Performance Electronics on Fabric, Vinyl, Leather, and Paper journal September 2009
Microheater-integrated single gas sensor array chip fabricated on flexible polyimide substrate journal March 2006
High-mobility polymer gate dielectric pentacene thin film transistors journal November 2002
Fabrication of periodic nanostructures by phase-controlled multiple-beam interference journal December 2003
Pentacene thin film transistors on inorganic dielectrics: Morphology, structural properties, and electronic transport journal January 2003
Bulk Quantities of Single-Crystal Silicon Micro-/Nanoribbons Generated from Bulk Wafers journal October 2006
A hemispherical electronic eye camera based on compressible silicon optoelectronics journal August 2008
Curvilinear Electronics Formed Using Silicon Membrane Circuits and Elastomeric Transfer Elements journal October 2009
Guided Growth of Large-Scale, Horizontally Aligned Arrays of Single-Walled Carbon Nanotubes and Their Use in Thin-Film Transistors journal August 2005
Spatially Selective Guided Growth of High-Coverage Arrays and Random Networks of Single-Walled Carbon Nanotubes and Their Integration into Electronic Devices journal April 2006
Radio frequency analog electronics based on carbon nanotube transistors journal January 2008
Control of Si Nanowire Growth by Oxygen journal June 2006
High efficiency GaAs thin film solar cells by peeled film technology journal December 1978
Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts journal February 2004
Nanotube Molecular Wires as Chemical Sensors journal January 2000
Structures of indium oxide nanobelts journal October 2003
Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers journal October 1998
A flexible and wearable glucose sensor based on functional polymers with Soft-MEMS techniques journal October 2006
Mesoscale organization of metal nanocrystals journal January 2002
Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ‘‘ink’’ followed by chemical etching journal October 1993
Patterning Self-Assembled Monolayers: Applications in Materials Science journal May 1994
Thermally-stable low-resistance Ti/Al/Mo/Au multilayer ohmic contacts on n–GaN journal August 2002
Effect of mismatch strain on band gap in III‐V semiconductors journal June 1985
Crystallographic alignment of high-density gallium nitride nanowire arrays journal July 2004
Stretchable gold conductors on elastomeric substrates journal April 2003
Stretchable Interconnects for Elastic Electronic Surfaces journal August 2005
Design and Performance of Thin Metal Film Interconnects for Skin-Like Electronic Circuits journal April 2004
An Elastically Stretchable TFT Circuit journal December 2004
Stiff subcircuit islands of diamondlike carbon for stretchable electronics journal July 2006
Mechanisms of reversible stretchability of thin metal films on elastomeric substrates journal May 2006
Diamond growth in a direct-current low-pressure supersonic plasmajet journal March 1997
Electrical imaging of neuronal activity by multi-transistor-array (MTA) recording at 7.8 μm resolution journal August 2004
Some properties of spherical and rod-shaped semiconductor and metal nanocrystals journal January 2002
SEMICONDUCTOR NANOWIRES AND NANOTUBES journal August 2004
Nanoribbon Waveguides for Subwavelength Photonics Integration journal August 2004
III–V micromachined devices for microsystems journal September 1998
Degradation mechanism of diethylene glycol units in a terephthalate polymer journal April 2006
Thin film transistors for displays on plastic substrates journal August 2000
High-performance poly-Si TFTs on plastic substrates using a nano-structured separation layer approach journal January 2003
Organic light-emitting diodes formed by soft contact lamination journal January 2004
A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems journal October 2005
Large-Area, Selective Transfer of Microstructured Silicon: A Printing- Based Approach to High-Performance Thin-Film Transistors Supported on Flexible Substrates journal October 2005
Micron and submicron patterning of polydimethylsiloxane resists on electronic materials by decal transfer lithography and reactive ion-beam etching: Application to the fabrication of high-mobility, thin-film transistors journal October 2006
Fabrication of Stable Metallic Patterns Embedded in Poly(dimethylsiloxane) and Model Applications in Non-Planar Electronic and Lab-on-a-Chip Device Patterning journal April 2005
The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal silicon journal December 1999
Application of carbon nanotubes to field emission displays journal February 2001
Weave Patterned Organic Transistors on Fiber for E-Textiles journal February 2005
High-Resolution Contact Printing with Dendrimers journal April 2002
Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus journal October 2003
Electrospinning of Nanofibers: Reinventing the Wheel? journal July 2004
Compliant thin film patterns of stiff materials as platforms for stretchable electronics journal December 2005
ZnO nanobelts grown on Si substrate journal July 2002
Catalyst-Assisted Formation of Nanocantilever Arrays on ZnS Nanoribbons by Post-Annealing Treatment journal April 2006
The Incredible Shrinking Circuit journal September 2001
Nanoscale Science and Technology: Building a Big Future from Small Things journal July 2003
Flexible membrane pressure sensor journal April 2005
Creating micro- and nanostructures on tubular and spherical surfaces
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High-Performance Carbon Nanotube Field-Effect Transistor With Tunable Polarities journal September 2005
Fabrication technology for wafer through-hole interconnections and three-dimensional stacks of chips and wafers
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Thin Film Deposition, Patterning, and Printing in Organic Thin Film Transistors journal October 2004
Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics journal July 2002
High-resolution transfer printing on GaAs surfaces using alkane dithiol monolayers
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Interfacial Chemistries for Nanoscale Transfer Printing journal July 2002
Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination journal July 2002
Electrical Contacts to Molecular Layers by Nanotransfer Printing journal July 2003
Thermal conductivity of PET/(LDPE/AI) composites determined by MDSC journal September 2004
Electronic materials: Buckling down for flexible electronics journal December 2006
One-dimensional hole gas in germanium/silicon nanowire heterostructures journal July 2005
Nanowire Transistor Performance Limits and Applications journal November 2008
An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistors journal July 1992
Single-Crystal CdSe Nanosaws journal December 2003
Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers journal May 2006
Mechanically Strained Strained-Si NMOSFETs journal January 2004
Diamond-structured photonic crystals journal September 2004
Fully elastic interconnects on nanopatterned elastomeric substrates journal August 2006
Controlled growth of tetrapod-branched inorganic nanocrystals journal May 2003
Architectonic Quantum Dot Solids journal January 1999
Conducting elastomer surface texturing: a path to electrode spotting journal September 2004
Nanowire Arrays Defined by Nanoimprint Lithography journal April 2004
Template Synthesis of Electronically Conductive Polymer Nanostructures journal February 1995
Large Photoresponsivity in High-Mobility Single-Crystal Organic Field-Effect Phototransistors journal November 2005
Fabrication of Ordered Diamond/metal Nanocomposite Structures journal October 2000
An improved GaAs device model for the simulation of analog integrated circuit journal May 2003
High-Performance Nanowire Electronics and Photonics on Glass and Plastic Substrates journal November 2003
High-Performance Nanowire Electronics and Photonics and Nanoscale Patterning on Flexible Plastic Substrates journal July 2005
Diffusivity and Solubility of Si in the Al Metallization of Integrated Circuits journal December 1971
Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps journal October 2004
Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films journal September 2004
Transfer printing by kinetic control of adhesion to an elastomeric stamp journal December 2005
Stress focusing for controlled fracture in microelectromechanical systems journal February 2007
Ultrahigh-Density Nanowire Lattices and Circuits journal March 2003
A printable form of silicon for high performance thin film transistors on plastic substrates journal June 2004
High-Performance n- and p-Type Single-Crystal Organic Transistors with Free-Space Gate Dielectrics journal December 2004
Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing journal August 2004
Bendable single crystal silicon thin film transistors formed by printing on plastic substrates journal February 2005
Micromachining of three-dimensional GaAs membrane structures using high-energy nitrogen implantation journal October 2002
Printing meets lithography: Soft approaches to high-resolution patterning journal September 2001
Direct printing of polymer microstructures on flat and spherical surfaces using a letterpress technique
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Colloidal nanocrystal heterostructures with linear and branched topology journal July 2004
Plastic Electronics and Their Packaging Technologies journal April 2003
Emerging Methods for Micro- and Nanofabrication journal July 2001
Electrically Induced Optical Emission from a Carbon Nanotube FET journal May 2003
AlGaN/GaN HEMTs-an overview of device operation and applications journal June 2002
High-mobility ultrathin semiconducting films prepared by spin coating journal March 2004
Ink-Jet Printing of Binders for Ceramic Components journal April 2002
Individually Suspended Single-Walled Carbon Nanotubes in Various Surfactants journal October 2003
A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires journal January 1998
Adhesion enhancement by a dielectric barrier discharge of PDMS used for flexible and stretchable electronics journal November 2007
A New Etching Solution System, H3 PO4- H2O2- H2O, for GaAs and Its Kinetics journal January 1978
High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes journal January 1995
Mesoscopic self‐assembly of gold islands on diblock‐copolymer films journal January 1994
On the aging of oxygen plasma-treated polydimethylsiloxane surfaces journal June 1990
Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM journal December 2000
Nanotubes of the disulfides of groups 4 and 5 metals journal January 2002
Amorphous silicon detector and thin film transistor technology for large-area imaging of X-rays journal December 2000
Amorphous silicon technology for large area digital X-ray and optical imaging journal April 2002
Introduction to Organic Thin Film Transistors and Design of n-Channel Organic Semiconductors journal August 2004
Luminescence Photophysics in Semiconductor Nanocrystals journal November 1998
New Realization Method for Three-Dimensional Photonic Crystal in Optical Wavelength Region journal July 1996
Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors journal November 2004
Electric Field Effect in Atomically Thin Carbon Films journal October 2004
Band Gap Fluorescence from Individual Single-Walled Carbon Nanotubes journal July 2002
Field Configured Assembly: Programmed Manipulation and Self-assembly at the Mesoscale journal May 2004
Improved Pattern Transfer in Soft Lithography Using Composite Stamps journal June 2002
Ordering of microwrinkle patterns by compressive strain journal April 2004
Geometry-Dependent Stripe Rearrangement Processes Induced by Strain on Preordered Microwrinkle Patterns journal August 2005
High-Performance Semiconducting Polythiophenes for Organic Thin-Film Transistors journal March 2004
Design of High-Performance Regioregular Polythiophenes for Organic Thin-Film Transistors journal August 2005
High-Performance, Flexible Polymer Light-Emitting Diodes Fabricated by a Continuous Polymer Coating Process journal June 2002
High Frequency Properties of Electro-Textiles for Wearable Antenna Applications journal February 2008
Conversion of Some Siloxane Polymers to Silicon Oxide by UV/Ozone Photochemical Processes journal June 2000
Nanobelts of Semiconducting Oxides journal March 2001
Sharp exciton emission from single InAs quantum dots in GaAs nanowires journal September 2003
Application of Screen Printing in the Fabrication of Organic Light-Emitting Devices journal September 2000
Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter journal May 1997
Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates journal June 1998
Effect of diamondlike carbon coating and surface topography on the performance of metal evaporated magnetic tapes journal March 1998
Patterning Spherical Surfaces at the Two-Hundred-Nanometer Scale Using Soft Lithography journal April 2003
GaN: Processing, defects, and devices journal July 1999
Shape control of CdSe nanocrystals journal March 2000
Protective diamond-like carbon coatings for future optical storage disks journal March 2005
Hall Effect in the Accumulation Layers on the Surface of Organic Semiconductors journal November 2005
Stars and stripes. Nanoscale misfit dislocation patterns on surfaces journal January 2002
From Micro- to Nanofabrication with Soft Materials journal November 2000
Laser-lithography on non-planar surfaces journal January 2007
Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants journal January 1989
High-power laser diodes based on InGaAsP alloys journal June 1994
Dependence of Interface State Density on Silicon Thermal Oxidation Process Variables journal January 1979
Macroelectronics: Perspectives on Technology and Applications journal July 2005
Macroelectronics journal June 2006
Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design journal February 1998
All-Inorganic Field Effect Transistors Fabricated by Printing journal October 1999
Looking at Rubber Adhesion journal March 1979
Elastically relaxed free-standing strained-silicon nanomembranes journal April 2006
GaAs Readied for High-Speed Microcircuits journal January 1983
Integration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuits journal January 2005
Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field journal May 1997
Generating ∼90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask
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Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers journal September 1998
Printing Process Suitable for Reel-to-Reel Production of High-Performance Organic Transistors and Circuits journal June 1999
Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping journal March 2000
Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks journal April 2001
Printed plastic electronics and paperlike displays journal August 2002
Farewell to Flatland journal July 2010
Rubber Stamping for Plastic Electronics and Fiber Optics journal July 2001
Toward Paperlike Displays journal February 2001
High Performance Electrolyte Gated Carbon Nanotube Transistors journal August 2002
Universal description of channel conductivity for nanotube and nanowire transistors journal August 2003
Photonic crystal structure with square symmetry within each layer and a three-dimensional band gap journal June 2003
Optimal strategy for controlling linewidth on spherical focal surface arrays
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Semiconductor nanowires for novel one-dimensional devices journal March 2004
Morphology of nanostructured materials journal January 2002
Low-Temperature Materials and Thin Film Transistors for Flexible Electronics journal August 2005
Thin-film GaAs epitaxial lift-off solar cells for space applications
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Photon confinement in high-efficiency, thin-film III–V solar cells obtained by epitaxial lift-off journal July 2006
Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing journal February 2003
Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography journal April 2000
Nanotechnology: Thin solid films roll up into nanotubes journal March 2001
Aluminum metallization—Advantages and limitations for integrated circuit applications journal January 1969
Mechanical properties of silicones for MEMS journal April 2008
Ambipolar Pentacene Field-Effect Transistors and Inverters journal February 2000
The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives journal July 1998
On the relationship between the temperature coefficient of resistance and the thermal conductance of integrated metal resistors journal October 2004
Bending experiment on pentacene field-effect transistors on plastic films journal February 2005
A Rubberlike Stretchable Active Matrix Using Elastic Conductors journal September 2008
Nonequilibrium processes for generating silicon nanostructures in single-crystalline silicon journal January 2002
High-Mobility Poly-Si Thin Film Transistors Fabricated on Stainless-Steel Foils by Low-Temperature Processes Using Sputter-Depositions journal May 2000
Functional Pixel Circuits for Elastic AMOLED Displays journal July 2005
Electronic Textiles Charge Ahead journal August 2003
From Si Source Gas Directly to Positioned, Electrically Contacted Si Nanowires: The Self-Assembling “Grow-in-Place” Approach journal November 2004
Holographic photonic crystals with diamond symmetry journal November 2003
Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substrates journal February 2002
Formation and characterization of silicon films on flexible polymer substrates journal April 2005
Synthesis of Large Areas of Highly Oriented, Very Long Silicon Nanowires journal September 2000
Free-standing Single Crystal Silicon Nanoribbons journal November 2001
Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing journal October 2004
Axisymmetric adhesion tests of soft materials journal April 1998
Microsolidics: Fabrication of Three-Dimensional Metallic Microstructures in Poly(dimethylsiloxane) journal March 2007
An analytical back-gate bias effect model for ultrathin SOI CMOS devices journal April 1993
Inkjet Printing of Functional Materials journal November 2003
High-Resolution Inkjet Printing of All-Polymer Transistor Circuits journal December 2000
Device Physics of Solution-Processed Organic Field-Effect Transistors journal October 2005
Colloidal Inks for Directed Assembly of 3-D Periodic Structures journal July 2002
Electric-field assisted assembly and alignment of metallic nanowires journal August 2000
Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes journal August 2005
Integration of Organic FETs With Organic Photodiodes for a Large Area, Flexible, and Lightweight Sheet Image Scanners journal November 2005
A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications journal June 2004
Optics: Electronic eyeballs journal August 2008
InGaAs metal-semiconductor-metal photodetectors for long wavelength optical communications journal March 1991
Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems journal March 2007
A buckling-based metrology for measuring the elastic moduli of polymeric thin films journal July 2004
Fabrication of solid-state nanopores with single-nanometre precision journal July 2003
CMOL FPGA: a reconfigurable architecture for hybrid digital circuits with two-terminal nanodevices journal April 2005
Toward the Ultimate Tribological Interface: Surface Chemistry and Nanotribology of Ultrananocrystalline Diamond journal April 2005
Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates journal October 2004
Advances in organic field-effect transistors journal November 2004
Bendable GaAs metal-semiconductor field-effect transistors formed with printed GaAs wire arrays on plastic substrates journal August 2005
Photolithographic Route to the Fabrication of Micro/Nanowires of III-V Semiconductors journal January 2005
Inorganic Semiconductors for Flexible Electronics journal August 2007
Structural forms of single crystal semiconductor nanoribbons for high-performance stretchable electronics journal January 2007
Buckled and Wavy Ribbons of GaAs for High-Performance Electronics on Elastomeric Substrates journal November 2006
Controlled buckling of semiconductor nanoribbons for stretchable electronics journal December 2006
Elastomeric Transistor Stamps: Reversible Probing of Charge Transport in Organic Crystals journal March 2004
Mechanics of rollable and foldable film-on-foil electronics journal February 1999
Curved CCD detector devices and arrays for multispectral astrophysical applications and terrestrial stereo panoramic cameras conference September 2004
Over 30% efficient InGaP/GaAs tandem solar cells journal January 1997
PbSe Nanocrystal Solids for n- and p-Channel Thin Film Field-Effect Transistors journal October 2005
Performance enhancement of InGaN light-emitting diodes by laser lift-off and transfer from sapphire to copper substrate journal April 2004
Magnetic trapping and self-assembly of multicomponent nanowires journal May 2002
One-Dimensional Assemblies of Nanoparticles: Preparation, Properties, and Promise journal April 2005
Langmuir−Blodgett Silver Nanowire Monolayers for Molecular Sensing Using Surface-Enhanced Raman Spectroscopy journal September 2003
Anodization and Microcontact Printing on Electroless Silver: Solution-Based Fabrication Procedures for Low-Voltage Electronic Systems with Organic Active Components journal July 2000
Room-temperature deposition of high-purity silicon oxide films by RF plasma-enhanced CVD journal September 2001
Polysilicon thin film transistors fabricated at 100°C on a flexible plastic substrate conference December 1998
Photonic Band Gap Architectures for Holographic Lithography journal January 2004
Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores journal June 2003
Microscopic patterning of orientated mesoscopic silica through guided growth journal December 1997
Solution-Liquid-Solid Growth of Crystalline III-V Semiconductors: An Analogy to Vapor-Liquid-Solid Growth journal December 1995
Monolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology journal December 2003
Low-Temperature Polycrystalline Silicon Thin-Film Transist or Technologies for System-on-Glass Displays journal November 2002
Etching of DLC films using a low intensity oxygen plasma jet journal April 2000
Compliant substrate technology: Integration of mismatched materials for opto-electronic applications journal January 2000
Porous silica via colloidal crystallization journal October 1997
Molecular control over Au/GaAs diodes journal March 2000
On-chip natural assembly of silicon photonic bandgap crystals journal November 2001
Cheap and cheerful circuits journal September 2000
Silicon for thin-film transistors journal April 2003
Electronic skin: architecture and components journal November 2004
Vapor-liquid-solid mechanism of single crystal growth journal March 1964
A Solution-Phase, Precursor Route to Polycrystalline SnO2 Nanowires That Can Be Used for Gas Sensing under Ambient Conditions journal December 2003
Oxidation Resistant Germanium Nanowires: Bulk Synthesis, Long Chain Alkanethiol Functionalization, and Langmuir−Blodgett Assembly journal August 2005
Direct synthesis and characterization of CdS nanobelts journal July 2006
A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell journal January 2004
Controlled Growth of Large-Area, Uniform, Vertically Aligned Arrays of α-Fe2O3 Nanobelts and Nanowires journal January 2005
Large-Scale Hierarchical Organization of Nanowire Arrays for Integrated Nanosystems journal September 2003
Growth and properties of nanocrystalline diamond films journal October 2006
Comparison of the growth and properties of ultrananocrystalline diamond and nanocrystalline diamond journal April 2006
Functional nanoparticle architectures for sensoric, optoelectronic, and bioelectronic applications journal January 2002
Vertical scaling of carbon nanotube field-effect transistors using top gate electrodes journal May 2002
Effect of Mechanical and Electrical Stresses on the Performance of an a-Si:H TFT on Plastic Substrate journal January 2004
Amorphous silicon crystallization and polysilicon thin film transistors on SiO2 passivated steel foil substrates journal May 2001
Thermal oxide of polycrystalline silicon on steel foil as a thin-film transistor gate dielectric journal June 2001
Growth of Au-catalyzed ordered GaAs nanowire arrays by molecular-beam epitaxy journal December 2002
Inorganic Semiconductor Nanowires Rational Growth, Assembly, and Novel Properties journal March 2002
Growth, branching, and kinking of molecular-beam epitaxial <110> GaAs nanowires journal October 2003
Single-crystal metallic nanowires and metal/semiconductor nanowire heterostructures journal July 2004
Complementary metal-oxide-semiconductor thin-film transistor circuits from a high-temperature polycrystalline silicon process on steel foil substrates journal November 2002
Block-by-Block Growth of Single-Crystalline Si/SiGe Superlattice Nanowires journal February 2002
Direct Observation of Vapor−Liquid−Solid Nanowire Growth journal April 2001
Shadowed sputtering of gold on V -shaped microtrenches etched in silicon and applications in microfabrication journal September 1996
Soft Lithography journal March 1998
Soft Lithography journal August 1998
Unconventional Methods for Fabricating and Patterning Nanostructures journal May 1999
One-Dimensional Nanostructures: Synthesis, Characterization, and Applications journal March 2003
Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters journal July 1996
Ge/Si nanowire heterostructures as high-performance field-effect transistors journal May 2006
Polymer-controlled growth of Sb2Se3 nanoribbons via a hydrothermal process journal May 2003
Evaluation of polydimethylsiloxane scaffolds with physiologically-relevant elastic moduli: interplay of substrate mechanics and surface chemistry effects on vascular smooth muscle cell response journal June 2005
Mesoporous silica with micrometer-scale designs journal January 1997
Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
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Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser journal June 2002
RFID Tag and RF Structures on a Paper Substrate Using Inkjet-Printing Technology journal December 2007
The Chemistry and Physics of Semiconductor Nanowires journal February 2005
High-Field Electrical Transport in Single-Wall Carbon Nanotubes journal March 2000
Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates journal June 1994
A Soft Lithography Approach to the Fabrication of Nanostructures of Single Crystalline Silicon with Well-Defined Dimensions and Shapes journal October 2000
Colloidal nanocrystal synthesis and the organic–inorganic interface journal September 2005
Low-Voltage Organic Field-Effect Transistors and Inverters Enabled by Ultrathin Cross-Linked Polymers as Gate Dielectrics journal July 2005
Silicon Nanowires:  Preparation, Device Fabrication, and Transport Properties journal December 2000
Solution–Liquid–Solid Growth of Soluble GaAs Nanowires journal March 2003
Two-versus three-dimensional quantum confinement in indium phosphide wires and dots journal July 2003
High-speed strained-single-crystal-silicon thin-film transistors on flexible polymers journal July 2006
Small-Angle Neutron Scattering from Surfactant-Assisted Aqueous Dispersions of Carbon Nanotubes
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Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths journal October 1998
Nanoscale organic transistors that use source/drain electrodes supported by high resolution rubber stamps journal February 2003
Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing journal September 2003
Low-Temperature Growth and Photoluminescence Property of ZnS Nanoribbons journal October 2005
Oxide-Assisted Growth of Semiconducting Nanowires journal April 2003
Structure and photoluminescence of ZnSe nanoribbons grown by metal organic chemical vapor deposition journal April 2004
Electronic transport in nanometre-scale silicon-on-insulator membranes journal February 2006
Anomalous Coiling of SiGe/Si and SiGe/Si/Cr Helical Nanobelts journal July 2006
Improved field emission properties from metal-coated diamond films journal March 2007
Shape-and-solder-directed self-assembly to package semiconductor device segments journal October 2004
Sequential shape-and-solder-directed self-assembly of functional microsystems journal August 2004
An Efficient Two-Photon-Generated Photoacid Applied to Positive-Tone 3D Microfabrication journal May 2002
p-Channel, n-Channel Thin Film Transistors and p−n Diodes Based on Single Wall Carbon Nanotube Networks journal October 2004
Band Structure, Phonon Scattering, and the Performance Limit of Single-Walled Carbon Nanotube Transistors journal September 2005
Mechanism for stamp collapse in soft lithography journal December 2005
Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates journal March 2005

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Protective cases with integrated electronics patent August 2017
Micro assembled hybrid displays and lighting elements patent July 2017
Conformal electronics including nested serpentine interconnects patent July 2017
Micro assembled LED displays and lighting elements patent July 2017
Methods and applications of non-planar imaging arrays patent July 2017
Stamp with structured posts patent July 2017
Integrated devices to facilitate quantitative assays and diagnostics patent July 2017
Micro assembled LED displays and lighting elements patent July 2017
Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy patent May 2017
Catheter balloon having stretchable integrated circuitry and sensor array patent May 2017
Printed assemblies of ultrathin, microscale inorganic light emitting diodes for deformable and semitransparent displays patent May 2017
Printable inorganic semiconductor structures patent May 2017
Bit-plane pulse width modulated digital display system patent May 2017
Systems, methods, and devices using stretchable or flexible electronics for medical applications patent April 2017
Catheter balloon methods and apparatus employing sensing elements patent April 2017
Self-similar and fractal design for stretchable electronics patent April 2017
Optical systems fabricated by printing-based assembly patent March 2017
Electronic device having antenna patent March 2017
Embedding thin chips in polymer patent February 2017
Electronics for detection of a condition of tissue patent February 2017
Catheter device including flow sensing patent January 2017
Appendage mountable electronic devices conformable to surfaces patent January 2017
Apparatus and methods for micro-transfer-printing patent January 2017
Systems and methods for controlling release of transferable semiconductor structures patent March 2017
Cardiac catheter employing conformal electronics for mapping patent January 2017
Catheter balloon methods and apparatus employing sensing elements patent January 2017
Inorganic light-emitting diode with encapsulating reflector patent January 2017
Micro assembled LED displays and lighting elements patent December 2016
Extremely stretchable electronics patent December 2016
Stretchable form of single crystal silicon for high performance electronics on rubber substrates patent December 2016
Transient electronic devices comprising inorganic or hybrid inorganic and organic substrates and encapsulates patent November 2016
Self-compensating circuit for faulty display pixels patent October 2016
Methods and devices for fabricating and assembling printable semiconductor elements patent September 2016
Micro assembled LED displays and lighting elements patent September 2016
Micro assembled LED displays and lighting elements patent September 2016
Apparatus and methods for micro-transfer-printing patent September 2016
Strain isolation structures for stretchable electronics patent August 2016
Flexible temperature sensor including conformable electronics patent June 2016

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