Substrate inspection
Patent
·
OSTI ID:1132598
Various embodiments for substrate inspection are provided.
- Research Organization:
- KLA-Tencor Corporation, Milpitas, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- EE0003159;
- Assignee:
- KLA-Tencor Corp. (Milpitas, CA)
- Patent Number(s):
- 8,736,831
- Application Number:
- 13/472,421
- OSTI ID:
- 1132598
- Country of Publication:
- United States
- Language:
- English
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