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U.S. Department of Energy
Office of Scientific and Technical Information

Substrate inspection

Patent ·
OSTI ID:1132598
Various embodiments for substrate inspection are provided.
Research Organization:
KLA-Tencor Corporation, Milpitas, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
EE0003159;
Assignee:
KLA-Tencor Corp. (Milpitas, CA)
Patent Number(s):
8,736,831
Application Number:
13/472,421
OSTI ID:
1132598
Country of Publication:
United States
Language:
English