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Title: Removing a sheet from the surface of a melt using gas jets

Abstract

In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.

Inventors:
; ;
Publication Date:
Research Org.:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1129068
Patent Number(s):
8,685,162
Application Number:
13/037,789
Assignee:
Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA) GFO
DOE Contract Number:  
EE0000595
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011 Mar 01
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Kellerman, Peter L., Thronson, Gregory D., and Sun, Dawei. Removing a sheet from the surface of a melt using gas jets. United States: N. p., 2014. Web.
Kellerman, Peter L., Thronson, Gregory D., & Sun, Dawei. Removing a sheet from the surface of a melt using gas jets. United States.
Kellerman, Peter L., Thronson, Gregory D., and Sun, Dawei. Tue . "Removing a sheet from the surface of a melt using gas jets". United States. doi:. https://www.osti.gov/servlets/purl/1129068.
@article{osti_1129068,
title = {Removing a sheet from the surface of a melt using gas jets},
author = {Kellerman, Peter L. and Thronson, Gregory D. and Sun, Dawei},
abstractNote = {In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 01 00:00:00 EDT 2014},
month = {Tue Apr 01 00:00:00 EDT 2014}
}

Patent:

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