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Automated cassette-to-cassette substrate handling system

Patent ·
OSTI ID:1127094
; ; ; ;
An automated cassette-to-cassette substrate handling system includes a cassette storage module for storing a plurality of substrates in cassettes before and after processing. A substrate carrier storage module stores a plurality of substrate carriers. A substrate carrier loading/unloading module loads substrates from the cassette storage module onto the plurality of substrate carriers and unloads substrates from the plurality of substrate carriers to the cassette storage module. A transport mechanism transports the plurality of substrates between the cassette storage module and the plurality of substrate carriers and transports the plurality of substrate carriers between the substrate carrier loading/unloading module and a processing chamber. A vision system recognizes recesses in the plurality of substrate carriers corresponding to empty substrate positions in the substrate carrier. A processor receives data from the vision system and instructs the transport mechanism to transport substrates to positions on the substrate carrier in response to the received data.
Research Organization:
Veeco Instruments Inc., Plainview, NY, USA
Sponsoring Organization:
USDOE
DOE Contract Number:
EE0003252
Assignee:
Veeco Instruments Inc. (Plainview, NY)
Patent Number(s):
8,676,375
Application Number:
13/406,076
OSTI ID:
1127094
Country of Publication:
United States
Language:
English

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