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Title: Ovenized microelectromechanical system (MEMS) resonator

Abstract

An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.

Inventors:
; ;
Publication Date:
Research Org.:
SNL-A (Sandia National Laboratories, Albuquerque, NM (United States))
Sponsoring Org.:
USDOE
OSTI Identifier:
1126693
Patent Number(s):
8,669,823
Application Number:
13/442,689
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-A
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Olsson, Roy H, Wojciechowski, Kenneth, and Kim, Bongsang. Ovenized microelectromechanical system (MEMS) resonator. United States: N. p., 2014. Web.
Olsson, Roy H, Wojciechowski, Kenneth, & Kim, Bongsang. Ovenized microelectromechanical system (MEMS) resonator. United States.
Olsson, Roy H, Wojciechowski, Kenneth, and Kim, Bongsang. Tue . "Ovenized microelectromechanical system (MEMS) resonator". United States. doi:. https://www.osti.gov/servlets/purl/1126693.
@article{osti_1126693,
title = {Ovenized microelectromechanical system (MEMS) resonator},
author = {Olsson, Roy H and Wojciechowski, Kenneth and Kim, Bongsang},
abstractNote = {An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 11 00:00:00 EDT 2014},
month = {Tue Mar 11 00:00:00 EDT 2014}
}

Patent:

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Works referenced in this record:

CDATA[Ovenized and thermally tunable aluminum nitride microresonators
conference, October 2010


Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators
conference, June 2009

  • Wojciechowski, K. E.; Olsson, R. H.; Tuck, M. R.
  • Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
  • DOI: 10.1109/SENSOR.2009.5285626