Interfaces and Composition Profiles in Metal-Sulfide Nanolayers Synthesized by Atomic Layer Deposition

Journal Article · Tue Jan 01 00:00:00 EST 2013 · Chemistry of Materials

DOI:https://doi.org/10.1021/cm3027225· OSTI ID:1118133

Thimsen, E.; Baryshev, S. V.; Martinson, A. B. F.; Elam, J. W.; Veryovkin, I. V.; Pellin, M. J. ^[1]

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1. Energy Systems

• Research Organization: Argonne National Lab. (ANL), Argonne, IL (United States)
• Sponsoring Organization: USDOE Office of Science (SC); EE
• DOE Contract Number: DE-AC02-06CH11357
• OSTI ID: 1118133
• Report Number(s): ANL/MSD/JA-75189
• Journal Information: Chemistry of Materials, Vol. 25, Issue 3 ; 2013
• Country of Publication: United States
• Language: ENGLISH