Sandia National Laboratories SUMMiT VTM MEMS Process: Mature Technology with an Exciting Future.
Conference
·
OSTI ID:1117772
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1117772
- Report Number(s):
- SAND2012-1828C; 481232
- Resource Relation:
- Conference: Proposed for presentation at the The Micro, Precision, Nano & MEMS Manufacturing Event held March 7-8, 2012 in Rosemont, IL.
- Country of Publication:
- United States
- Language:
- English
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