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Title: Formation of Nanoscale Structures by Inductively Coupled Plasma Etching.

Abstract

Abstract not provided.

Authors:
; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1116140
Report Number(s):
SAND2012-9887C
480229
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the SPIE Optics and Optoelectroncis held April 15-18, 2013 in Prague, Czech Repulblic.
Country of Publication:
United States
Language:
English

Citation Formats

Henry, Michael David, Welch, Colin, Olynick, Deirdre, Liu, Zuwei, Holmberg, Anders, Peroz, Christopher, Robinson, Alex, Scherer, Axel, Mollenhauer, Thomas, and Genova, Vince. Formation of Nanoscale Structures by Inductively Coupled Plasma Etching.. United States: N. p., 2012. Web.
Henry, Michael David, Welch, Colin, Olynick, Deirdre, Liu, Zuwei, Holmberg, Anders, Peroz, Christopher, Robinson, Alex, Scherer, Axel, Mollenhauer, Thomas, & Genova, Vince. Formation of Nanoscale Structures by Inductively Coupled Plasma Etching.. United States.
Henry, Michael David, Welch, Colin, Olynick, Deirdre, Liu, Zuwei, Holmberg, Anders, Peroz, Christopher, Robinson, Alex, Scherer, Axel, Mollenhauer, Thomas, and Genova, Vince. Thu . "Formation of Nanoscale Structures by Inductively Coupled Plasma Etching.". United States. https://www.osti.gov/servlets/purl/1116140.
@article{osti_1116140,
title = {Formation of Nanoscale Structures by Inductively Coupled Plasma Etching.},
author = {Henry, Michael David and Welch, Colin and Olynick, Deirdre and Liu, Zuwei and Holmberg, Anders and Peroz, Christopher and Robinson, Alex and Scherer, Axel and Mollenhauer, Thomas and Genova, Vince},
abstractNote = {Abstract not provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2012},
month = {11}
}

Conference:
Other availability
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