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Title: Test surfaces useful for calibration of surface profilometers

Abstract

The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer.

Inventors:
; ;
Publication Date:
Research Org.:
BNL (Brookhaven National Laboratory (BNL), Upton, NY (United States))
Sponsoring Org.:
USDOE
OSTI Identifier:
1113535
Patent Number(s):
8,616,044
Application Number:
12/408,508
Assignee:
The Regents of the University of California (Oakland, CA); Brookhaven Science Associates, LLC (Upton, NY) BNL
DOE Contract Number:  
AC02-05CH11231; AC02-98CH10886
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Yashchuk, Valeriy V, McKinney, Wayne R, and Takacs, Peter Z. Test surfaces useful for calibration of surface profilometers. United States: N. p., 2013. Web.
Yashchuk, Valeriy V, McKinney, Wayne R, & Takacs, Peter Z. Test surfaces useful for calibration of surface profilometers. United States.
Yashchuk, Valeriy V, McKinney, Wayne R, and Takacs, Peter Z. Tue . "Test surfaces useful for calibration of surface profilometers". United States. https://www.osti.gov/servlets/purl/1113535.
@article{osti_1113535,
title = {Test surfaces useful for calibration of surface profilometers},
author = {Yashchuk, Valeriy V and McKinney, Wayne R and Takacs, Peter Z},
abstractNote = {The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 31 00:00:00 EST 2013},
month = {Tue Dec 31 00:00:00 EST 2013}
}

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