Physics-based signal processing algorithms for micromachined cantilever arrays
Patent
·
OSTI ID:1108966
A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.
- Research Organization:
- LLNL (Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States))
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Lawrence Livermore National Security, LLC (Livermore, CA)
- Patent Number(s):
- 8,584,506
- Application Number:
- 11/435,495
- OSTI ID:
- 1108966
- Country of Publication:
- United States
- Language:
- English
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