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Title: Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus

Patent ·
OSTI ID:1108010

Laser-assisted apparatus and methods for performing nanoscale material processing, including nanodeposition of materials, can be controlled very precisely to yield both simple and complex structures with sizes less than 100 nm. Optical or thermal energy in the near field of a photon (laser) pulse is used to fabricate submicron and nanometer structures on a substrate. A wide variety of laser material processing techniques can be adapted for use including, subtractive (e.g., ablation, machining or chemical etching), additive (e.g., chemical vapor deposition, selective self-assembly), and modification (e.g., phase transformation, doping) processes. Additionally, the apparatus can be integrated into imaging instruments, such as SEM and TEM, to allow for real-time imaging of the material processing.

Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-05CH11231
Assignee:
The Regents of the University of California (Oakland, CA)
Patent Number(s):
8,580,130
Application Number:
12/743,550
OSTI ID:
1108010
Country of Publication:
United States
Language:
English

References (3)

Method of producing compound nanorods and thin films patent August 2010
Room-Temperature Ultraviolet Nanowire Nanolasers journal June 2001
Nanolasers: lasing from nanoscale quantum wires journal January 2004

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