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Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector

Patent ·
OSTI ID:1107633
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The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.

Research Organization:
LBNL (Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States))
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-05CH11231
Assignee:
LBNL
Patent Number(s):
8,569,677
Application Number:
12/843,773
OSTI ID:
1107633
Country of Publication:
United States
Language:
English

References (6)

Instrumentation for analysis and utilization of extreme-ultraviolet and soft x-ray high-order harmonics journal November 2004
Achromatic interferometric lithography for 100-nm-period gratings and grids journal November 1995
Efficient monochromator to isolate VUV light generated by four-wave mixing techniques journal January 1988
Time-delay compensated monochromator for the spectral selection of extreme-ultraviolet high-order laser harmonics journal December 2009
Nanograting-based compact vacuum ultraviolet spectrometer and beam profiler for in situ characterization of high-order harmonic generation light sources journal June 2010
Large-area achromatic interferometric lithography for 100 nm period gratings and grids journal November 1996

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