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Title: Path to Deterministic Single Donor Devices using Focused Top-Down Ion Implantation.

Abstract

Abstract not provided.

Authors:
; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1106763
Report Number(s):
SAND2011-7539C
464880
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the Advanced Lithography Workshop held November 8-9, 2011 in Gainesville, FL.
Country of Publication:
United States
Language:
English

Citation Formats

Bielejec, Edward S, Bishop, Nathaniel, and Carroll, Malcolm S. Path to Deterministic Single Donor Devices using Focused Top-Down Ion Implantation.. United States: N. p., 2011. Web.
Bielejec, Edward S, Bishop, Nathaniel, & Carroll, Malcolm S. Path to Deterministic Single Donor Devices using Focused Top-Down Ion Implantation.. United States.
Bielejec, Edward S, Bishop, Nathaniel, and Carroll, Malcolm S. Sat . "Path to Deterministic Single Donor Devices using Focused Top-Down Ion Implantation.". United States. https://www.osti.gov/servlets/purl/1106763.
@article{osti_1106763,
title = {Path to Deterministic Single Donor Devices using Focused Top-Down Ion Implantation.},
author = {Bielejec, Edward S and Bishop, Nathaniel and Carroll, Malcolm S.},
abstractNote = {Abstract not provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2011},
month = {10}
}

Conference:
Other availability
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