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Title: Resolution Limits of Electron-Beam Lithography toward the Atomic Scale

Authors:
; ; ; ; ; ;
Publication Date:
Research Org.:
Energy Frontier Research Centers (EFRC) (United States). Center for Excitonics (CE)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1105693
DOE Contract Number:  
SC0001088
Resource Type:
Journal Article
Journal Name:
Nano Lett.
Additional Journal Information:
Journal Volume: 13; Related Information: CE partners with Massachusetts Institute of Technology (lead); Brookhaven National Laboratory; Harvard University
Country of Publication:
United States
Language:
English
Subject:
solar (photovoltaic), solid state lighting, photosynthesis (natural and artificial), charge transport, optics, synthesis (novel materials), synthesis (self-assembly), synthesis (scalable processing)

Citation Formats

Manfrinato, Vitor R., Zhang, Lihua, Su, Dong, Duan, Huigao, Hobbs, Richard G., Stach, Eric A., and Berggren, Karl K. Resolution Limits of Electron-Beam Lithography toward the Atomic Scale. United States: N. p., 2013. Web. doi:10.1021/nl304715p.
Manfrinato, Vitor R., Zhang, Lihua, Su, Dong, Duan, Huigao, Hobbs, Richard G., Stach, Eric A., & Berggren, Karl K. Resolution Limits of Electron-Beam Lithography toward the Atomic Scale. United States. https://doi.org/10.1021/nl304715p
Manfrinato, Vitor R., Zhang, Lihua, Su, Dong, Duan, Huigao, Hobbs, Richard G., Stach, Eric A., and Berggren, Karl K. 2013. "Resolution Limits of Electron-Beam Lithography toward the Atomic Scale". United States. https://doi.org/10.1021/nl304715p.
@article{osti_1105693,
title = {Resolution Limits of Electron-Beam Lithography toward the Atomic Scale},
author = {Manfrinato, Vitor R. and Zhang, Lihua and Su, Dong and Duan, Huigao and Hobbs, Richard G. and Stach, Eric A. and Berggren, Karl K.},
abstractNote = {},
doi = {10.1021/nl304715p},
url = {https://www.osti.gov/biblio/1105693}, journal = {Nano Lett.},
number = ,
volume = 13,
place = {United States},
year = {Tue Mar 19 00:00:00 EDT 2013},
month = {Tue Mar 19 00:00:00 EDT 2013}
}