Resolution Limits of Electron-Beam Lithography toward the Atomic Scale
- Authors:
- Publication Date:
- Research Org.:
- Energy Frontier Research Centers (EFRC) (United States). Center for Excitonics (CE)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1105693
- DOE Contract Number:
- SC0001088
- Resource Type:
- Journal Article
- Journal Name:
- Nano Lett.
- Additional Journal Information:
- Journal Volume: 13; Related Information: CE partners with Massachusetts Institute of Technology (lead); Brookhaven National Laboratory; Harvard University
- Country of Publication:
- United States
- Language:
- English
- Subject:
- solar (photovoltaic), solid state lighting, photosynthesis (natural and artificial), charge transport, optics, synthesis (novel materials), synthesis (self-assembly), synthesis (scalable processing)
Citation Formats
Manfrinato, Vitor R., Zhang, Lihua, Su, Dong, Duan, Huigao, Hobbs, Richard G., Stach, Eric A., and Berggren, Karl K. Resolution Limits of Electron-Beam Lithography toward the Atomic Scale. United States: N. p., 2013.
Web. doi:10.1021/nl304715p.
Manfrinato, Vitor R., Zhang, Lihua, Su, Dong, Duan, Huigao, Hobbs, Richard G., Stach, Eric A., & Berggren, Karl K. Resolution Limits of Electron-Beam Lithography toward the Atomic Scale. United States. https://doi.org/10.1021/nl304715p
Manfrinato, Vitor R., Zhang, Lihua, Su, Dong, Duan, Huigao, Hobbs, Richard G., Stach, Eric A., and Berggren, Karl K. 2013.
"Resolution Limits of Electron-Beam Lithography toward the Atomic Scale". United States. https://doi.org/10.1021/nl304715p.
@article{osti_1105693,
title = {Resolution Limits of Electron-Beam Lithography toward the Atomic Scale},
author = {Manfrinato, Vitor R. and Zhang, Lihua and Su, Dong and Duan, Huigao and Hobbs, Richard G. and Stach, Eric A. and Berggren, Karl K.},
abstractNote = {},
doi = {10.1021/nl304715p},
url = {https://www.osti.gov/biblio/1105693},
journal = {Nano Lett.},
number = ,
volume = 13,
place = {United States},
year = {Tue Mar 19 00:00:00 EDT 2013},
month = {Tue Mar 19 00:00:00 EDT 2013}
}
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