Passivation of In0.53Ga0.47As/ZrO2 interfaces by AlN atomic layer deposition process
Journal Article
·
· Journal of Applied Physics
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOE SC OFFICE OF SCIENCE (SC)
- DOE Contract Number:
- DE-AC02-98CH10886
- OSTI ID:
- 1093804
- Report Number(s):
- BNL-101479-2013-JA; R&D Project: LS001
- Journal Information:
- Journal of Applied Physics, Vol. 114, Issue 3; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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