Interface-Controlled High Dielectric Constant Al{sub 2}O{sub 3}/TiO{sub x} Nanolaminates with Low Loss and Low Leakage Current Density for New Generation Nanodevices
Journal Article
·
· Journal of Applied Physics
- Materials Science Division
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- SC OFFICE OF BAISC ENERGY SCIENCES; NATIONAL SCIENE FOUNDATION
- DOE Contract Number:
- DE-AC02-06CH11357
- OSTI ID:
- 1093536
- Report Number(s):
- ANL/MSD/JA-77288
- Journal Information:
- Journal of Applied Physics, Vol. 114, Issue 2 ; 2013
- Country of Publication:
- United States
- Language:
- ENGLISH
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