skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Precursors for the polymer-assisted deposition of films

Abstract

A polymer assisted deposition process for deposition of metal oxide films is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.

Inventors:
; ; ;
Publication Date:
Research Org.:
LANL (Los Alamos National Laboratory (LANL), Los Alamos, NM (United States))
Sponsoring Org.:
USDOE
OSTI Identifier:
1092943
Patent Number(s):
8,530,554
Application Number:
12/150,627
Assignee:
Los Alamos National Security, LLC (Los Alamos, NM) LANL
DOE Contract Number:  
AC52-06NA25396
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

McCleskey, Thomas M., Burrell, Anthony K., Jia, Quanxi, and Lin, Yuan. Precursors for the polymer-assisted deposition of films. United States: N. p., 2013. Web.
McCleskey, Thomas M., Burrell, Anthony K., Jia, Quanxi, & Lin, Yuan. Precursors for the polymer-assisted deposition of films. United States.
McCleskey, Thomas M., Burrell, Anthony K., Jia, Quanxi, and Lin, Yuan. Tue . "Precursors for the polymer-assisted deposition of films". United States. https://www.osti.gov/servlets/purl/1092943.
@article{osti_1092943,
title = {Precursors for the polymer-assisted deposition of films},
author = {McCleskey, Thomas M. and Burrell, Anthony K. and Jia, Quanxi and Lin, Yuan},
abstractNote = {A polymer assisted deposition process for deposition of metal oxide films is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 10 00:00:00 EDT 2013},
month = {Tue Sep 10 00:00:00 EDT 2013}
}

Patent:

Save / Share: